10/1/2010	2:51:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2010	2:52:00 PM	Recipe started at 2:52 PM
10/1/2010	2:52:00 PM	H2 valve closed
10/1/2010	2:52:00 PM	BCl3 valve closed
10/1/2010	2:52:00 PM	PH3 valve closed
10/1/2010	2:52:00 PM	SiCl4 pre valve closed
10/1/2010	2:52:00 PM	SiCl4 post valve closed
10/1/2010	2:52:00 PM	Main Vac valve closed
10/1/2010	2:52:00 PM	Bypass valve closed
10/1/2010	2:52:00 PM	Bubbler valve closed
10/1/2010	2:52:00 PM	Helium valve opened
10/1/2010	2:52:00 PM	Helium MFC set to  500.000000
10/1/2010	2:52:00 PM	H2 MFC set to  0.000000
10/1/2010	2:52:00 PM	BCl3 MFC set to  0.000000
10/1/2010	2:52:00 PM	PHl3 MFC set to  0.000000
10/1/2010	2:52:00 PM	SiCl4 MFC set to  0.000000
10/1/2010	2:52:00 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	2:52:00 PM	Tube furnace set to 0
10/1/2010	2:53:19 PM	Helium valve closed
10/1/2010	2:53:19 PM	H2 valve closed
10/1/2010	2:53:19 PM	BCl3 valve closed
10/1/2010	2:53:19 PM	PH3 valve closed
10/1/2010	2:53:19 PM	SiCl4 pre valve closed
10/1/2010	2:53:19 PM	SiCl4 post valve closed
10/1/2010	2:53:19 PM	Main Vac valve closed
10/1/2010	2:53:19 PM	Bypass valve closed
10/1/2010	2:53:19 PM	Bubbler valve closed
10/1/2010	2:53:19 PM	Helium MFC set to  0.000000
10/1/2010	2:53:19 PM	H2 MFC set to  0.000000
10/1/2010	2:53:19 PM	BCl3 MFC set to  0.000000
10/1/2010	2:53:19 PM	PHl3 MFC set to  0.000000
10/1/2010	2:53:19 PM	SiCl4 MFC set to  0.000000
10/1/2010	2:53:19 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	2:53:19 PM	Tube furnace set to 0
10/1/2010	2:53:19 PM	Run finished at 2:53 PM
10/1/2010	2:53:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2010	3:08:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	3:09:00 PM	Recipe started at 3:09 PM
10/1/2010	3:09:00 PM	Helium valve closed
10/1/2010	3:09:00 PM	H2 valve closed
10/1/2010	3:09:00 PM	BCl3 valve closed
10/1/2010	3:09:00 PM	PH3 valve closed
10/1/2010	3:09:00 PM	SiCl4 pre valve closed
10/1/2010	3:09:00 PM	SiCl4 post valve closed
10/1/2010	3:09:00 PM	Main Vac valve closed
10/1/2010	3:09:00 PM	Bubbler valve closed
10/1/2010	3:09:00 PM	Bypass valve opened
10/1/2010	3:09:00 PM	Helium MFC set to  0.000000
10/1/2010	3:09:00 PM	H2 MFC set to  0.000000
10/1/2010	3:09:00 PM	BCl3 MFC set to  0.000000
10/1/2010	3:09:00 PM	PHl3 MFC set to  0.000000
10/1/2010	3:09:00 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:09:00 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:09:00 PM	Tube furnace set to 0
10/1/2010	3:10:45 PM	Run aborted at 3:10 PM
10/1/2010	3:10:45 PM	Helium valve closed
10/1/2010	3:10:45 PM	H2 valve closed
10/1/2010	3:10:45 PM	BCl3 valve closed
10/1/2010	3:10:45 PM	PH3 valve closed
10/1/2010	3:10:45 PM	SiCl4 pre valve closed
10/1/2010	3:10:45 PM	SiCl4 post valve closed
10/1/2010	3:10:45 PM	Bypass valve closed
10/1/2010	3:10:45 PM	Main Vac valve closed
10/1/2010	3:10:45 PM	Bubbler valve closed
10/1/2010	3:10:45 PM	Helium MFC set to  0.000000
10/1/2010	3:10:45 PM	H2 MFC set to  0.000000
10/1/2010	3:10:45 PM	BCl3 MFC set to  0.000000
10/1/2010	3:10:45 PM	PHl3 MFC set to  0.000000
10/1/2010	3:10:45 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:10:45 PM	Tube furnace set to 0
10/1/2010	3:10:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	3:14:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	3:14:09 PM	Recipe started at 3:14 PM
10/1/2010	3:14:09 PM	Helium valve closed
10/1/2010	3:14:09 PM	H2 valve closed
10/1/2010	3:14:09 PM	BCl3 valve closed
10/1/2010	3:14:09 PM	PH3 valve closed
10/1/2010	3:14:09 PM	SiCl4 pre valve closed
10/1/2010	3:14:09 PM	SiCl4 post valve closed
10/1/2010	3:14:09 PM	Main Vac valve closed
10/1/2010	3:14:09 PM	Bubbler valve closed
10/1/2010	3:14:09 PM	Bypass valve opened
10/1/2010	3:14:09 PM	Helium MFC set to  0.000000
10/1/2010	3:14:09 PM	H2 MFC set to  0.000000
10/1/2010	3:14:09 PM	BCl3 MFC set to  0.000000
10/1/2010	3:14:09 PM	PHl3 MFC set to  0.000000
10/1/2010	3:14:09 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:14:09 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:14:10 PM	Tube furnace set to 0
10/1/2010	3:15:01 PM	Helium valve closed
10/1/2010	3:15:01 PM	H2 valve closed
10/1/2010	3:15:01 PM	BCl3 valve closed
10/1/2010	3:15:01 PM	PH3 valve closed
10/1/2010	3:15:01 PM	SiCl4 pre valve closed
10/1/2010	3:15:01 PM	SiCl4 post valve closed
10/1/2010	3:15:01 PM	Bubbler valve closed
10/1/2010	3:15:01 PM	Main Vac valve opened
10/1/2010	3:15:01 PM	Bypass valve opened
10/1/2010	3:15:01 PM	Helium MFC set to  0.000000
10/1/2010	3:15:01 PM	H2 MFC set to  0.000000
10/1/2010	3:15:01 PM	BCl3 MFC set to  0.000000
10/1/2010	3:15:01 PM	PHl3 MFC set to  0.000000
10/1/2010	3:15:01 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:15:01 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:15:01 PM	Tube furnace set to 0
10/1/2010	3:15:01 PM	Run finished at 3:15 PM
10/1/2010	3:15:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	3:15:21 PM	Helium MFC set to  100.000000
10/1/2010	3:15:36 PM	Helium valve opened
10/1/2010	3:16:30 PM	Helium MFC set to  500.000000
10/1/2010	3:16:38 PM	Helium MFC set to  500.000000
10/1/2010	3:16:45 PM	Helium valve closed
10/1/2010	3:16:47 PM	Helium MFC set to  0.000000
10/1/2010	3:16:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	3:17:03 PM	Recipe started at 3:16 PM
10/1/2010	3:17:03 PM	Helium valve closed
10/1/2010	3:17:03 PM	H2 valve closed
10/1/2010	3:17:03 PM	BCl3 valve closed
10/1/2010	3:17:03 PM	PH3 valve closed
10/1/2010	3:17:03 PM	SiCl4 pre valve closed
10/1/2010	3:17:03 PM	SiCl4 post valve closed
10/1/2010	3:17:03 PM	Main Vac valve closed
10/1/2010	3:17:03 PM	Bubbler valve closed
10/1/2010	3:17:03 PM	Bypass valve opened
10/1/2010	3:17:03 PM	Helium MFC set to  0.000000
10/1/2010	3:17:03 PM	H2 MFC set to  0.000000
10/1/2010	3:17:03 PM	BCl3 MFC set to  0.000000
10/1/2010	3:17:03 PM	PHl3 MFC set to  0.000000
10/1/2010	3:17:03 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:17:03 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:17:03 PM	Tube furnace set to 0
10/1/2010	3:17:03 PM	Helium valve closed
10/1/2010	3:17:03 PM	H2 valve closed
10/1/2010	3:17:03 PM	BCl3 valve closed
10/1/2010	3:17:03 PM	PH3 valve closed
10/1/2010	3:17:03 PM	SiCl4 pre valve closed
10/1/2010	3:17:03 PM	SiCl4 post valve closed
10/1/2010	3:17:03 PM	Bubbler valve closed
10/1/2010	3:17:03 PM	Main Vac valve opened
10/1/2010	3:17:03 PM	Bypass valve opened
10/1/2010	3:17:03 PM	Helium MFC set to  0.000000
10/1/2010	3:17:03 PM	H2 MFC set to  0.000000
10/1/2010	3:17:03 PM	BCl3 MFC set to  0.000000
10/1/2010	3:17:03 PM	PHl3 MFC set to  0.000000
10/1/2010	3:17:03 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:17:03 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:17:03 PM	Tube furnace set to 0
10/1/2010	3:18:03 PM	H2 valve closed
10/1/2010	3:18:03 PM	BCl3 valve closed
10/1/2010	3:18:03 PM	PH3 valve closed
10/1/2010	3:18:03 PM	SiCl4 pre valve closed
10/1/2010	3:18:03 PM	SiCl4 post valve closed
10/1/2010	3:18:03 PM	Bubbler valve closed
10/1/2010	3:18:03 PM	Helium valve opened
10/1/2010	3:18:03 PM	Main Vac valve opened
10/1/2010	3:18:03 PM	Bypass valve opened
10/1/2010	3:18:03 PM	Helium MFC set to  100.000000
10/1/2010	3:18:03 PM	H2 MFC set to  0.000000
10/1/2010	3:18:03 PM	BCl3 MFC set to  0.000000
10/1/2010	3:18:03 PM	PHl3 MFC set to  0.000000
10/1/2010	3:18:03 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:18:03 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:18:04 PM	Tube furnace set to 0
10/1/2010	3:19:04 PM	Helium valve closed
10/1/2010	3:19:04 PM	H2 valve closed
10/1/2010	3:19:04 PM	BCl3 valve closed
10/1/2010	3:19:04 PM	PH3 valve closed
10/1/2010	3:19:04 PM	SiCl4 pre valve closed
10/1/2010	3:19:04 PM	SiCl4 post valve closed
10/1/2010	3:19:04 PM	Bubbler valve closed
10/1/2010	3:19:04 PM	Main Vac valve opened
10/1/2010	3:19:04 PM	Bypass valve opened
10/1/2010	3:19:04 PM	Helium MFC set to  0.000000
10/1/2010	3:19:04 PM	H2 MFC set to  0.000000
10/1/2010	3:19:04 PM	BCl3 MFC set to  0.000000
10/1/2010	3:19:04 PM	PHl3 MFC set to  0.000000
10/1/2010	3:19:04 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:19:04 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:19:04 PM	Tube furnace set to 0
10/1/2010	3:20:04 PM	H2 valve closed
10/1/2010	3:20:04 PM	BCl3 valve closed
10/1/2010	3:20:04 PM	PH3 valve closed
10/1/2010	3:20:04 PM	SiCl4 pre valve closed
10/1/2010	3:20:04 PM	SiCl4 post valve closed
10/1/2010	3:20:04 PM	Bubbler valve closed
10/1/2010	3:20:04 PM	Helium valve opened
10/1/2010	3:20:04 PM	Main Vac valve opened
10/1/2010	3:20:04 PM	Bypass valve opened
10/1/2010	3:20:04 PM	Helium MFC set to  100.000000
10/1/2010	3:20:04 PM	H2 MFC set to  0.000000
10/1/2010	3:20:04 PM	BCl3 MFC set to  0.000000
10/1/2010	3:20:04 PM	PHl3 MFC set to  0.000000
10/1/2010	3:20:04 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:20:04 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:20:04 PM	Tube furnace set to 0
10/1/2010	3:21:04 PM	Helium valve closed
10/1/2010	3:21:04 PM	H2 valve closed
10/1/2010	3:21:04 PM	BCl3 valve closed
10/1/2010	3:21:04 PM	PH3 valve closed
10/1/2010	3:21:04 PM	SiCl4 pre valve closed
10/1/2010	3:21:04 PM	SiCl4 post valve closed
10/1/2010	3:21:04 PM	Bubbler valve closed
10/1/2010	3:21:04 PM	Main Vac valve opened
10/1/2010	3:21:04 PM	Bypass valve opened
10/1/2010	3:21:04 PM	Helium MFC set to  0.000000
10/1/2010	3:21:04 PM	H2 MFC set to  0.000000
10/1/2010	3:21:04 PM	BCl3 MFC set to  0.000000
10/1/2010	3:21:04 PM	PHl3 MFC set to  0.000000
10/1/2010	3:21:04 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:21:04 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:21:04 PM	Tube furnace set to 0
10/1/2010	3:22:04 PM	H2 valve closed
10/1/2010	3:22:04 PM	BCl3 valve closed
10/1/2010	3:22:04 PM	PH3 valve closed
10/1/2010	3:22:04 PM	SiCl4 pre valve closed
10/1/2010	3:22:04 PM	SiCl4 post valve closed
10/1/2010	3:22:04 PM	Bubbler valve closed
10/1/2010	3:22:04 PM	Helium valve opened
10/1/2010	3:22:04 PM	Main Vac valve opened
10/1/2010	3:22:04 PM	Bypass valve opened
10/1/2010	3:22:04 PM	Helium MFC set to  100.000000
10/1/2010	3:22:04 PM	H2 MFC set to  0.000000
10/1/2010	3:22:04 PM	BCl3 MFC set to  0.000000
10/1/2010	3:22:04 PM	PHl3 MFC set to  0.000000
10/1/2010	3:22:04 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:22:04 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:22:04 PM	Tube furnace set to 0
10/1/2010	3:23:04 PM	Helium valve closed
10/1/2010	3:23:04 PM	H2 valve closed
10/1/2010	3:23:04 PM	BCl3 valve closed
10/1/2010	3:23:04 PM	PH3 valve closed
10/1/2010	3:23:04 PM	SiCl4 pre valve closed
10/1/2010	3:23:04 PM	SiCl4 post valve closed
10/1/2010	3:23:04 PM	Bubbler valve closed
10/1/2010	3:23:04 PM	Main Vac valve opened
10/1/2010	3:23:04 PM	Bypass valve opened
10/1/2010	3:23:04 PM	Helium MFC set to  0.000000
10/1/2010	3:23:04 PM	H2 MFC set to  0.000000
10/1/2010	3:23:04 PM	BCl3 MFC set to  0.000000
10/1/2010	3:23:04 PM	PHl3 MFC set to  0.000000
10/1/2010	3:23:04 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:23:04 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:23:05 PM	Tube furnace set to 0
10/1/2010	3:24:05 PM	H2 valve closed
10/1/2010	3:24:05 PM	BCl3 valve closed
10/1/2010	3:24:05 PM	PH3 valve closed
10/1/2010	3:24:05 PM	SiCl4 pre valve closed
10/1/2010	3:24:05 PM	SiCl4 post valve closed
10/1/2010	3:24:05 PM	Bubbler valve closed
10/1/2010	3:24:05 PM	Helium valve opened
10/1/2010	3:24:05 PM	Main Vac valve opened
10/1/2010	3:24:05 PM	Bypass valve opened
10/1/2010	3:24:05 PM	Helium MFC set to  100.000000
10/1/2010	3:24:05 PM	H2 MFC set to  0.000000
10/1/2010	3:24:05 PM	BCl3 MFC set to  0.000000
10/1/2010	3:24:05 PM	PHl3 MFC set to  0.000000
10/1/2010	3:24:05 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:24:05 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:24:05 PM	Tube furnace set to 0
10/1/2010	3:25:05 PM	Helium valve closed
10/1/2010	3:25:05 PM	H2 valve closed
10/1/2010	3:25:05 PM	BCl3 valve closed
10/1/2010	3:25:05 PM	PH3 valve closed
10/1/2010	3:25:05 PM	SiCl4 pre valve closed
10/1/2010	3:25:05 PM	SiCl4 post valve closed
10/1/2010	3:25:05 PM	Bubbler valve closed
10/1/2010	3:25:05 PM	Main Vac valve opened
10/1/2010	3:25:05 PM	Bypass valve opened
10/1/2010	3:25:05 PM	Helium MFC set to  0.000000
10/1/2010	3:25:05 PM	H2 MFC set to  0.000000
10/1/2010	3:25:05 PM	BCl3 MFC set to  0.000000
10/1/2010	3:25:05 PM	PHl3 MFC set to  0.000000
10/1/2010	3:25:05 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:25:05 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:25:05 PM	Tube furnace set to 0
10/1/2010	3:26:05 PM	H2 valve closed
10/1/2010	3:26:05 PM	BCl3 valve closed
10/1/2010	3:26:05 PM	PH3 valve closed
10/1/2010	3:26:05 PM	SiCl4 pre valve closed
10/1/2010	3:26:05 PM	SiCl4 post valve closed
10/1/2010	3:26:05 PM	Bubbler valve closed
10/1/2010	3:26:05 PM	Helium valve opened
10/1/2010	3:26:05 PM	Main Vac valve opened
10/1/2010	3:26:05 PM	Bypass valve opened
10/1/2010	3:26:05 PM	Helium MFC set to  100.000000
10/1/2010	3:26:05 PM	H2 MFC set to  0.000000
10/1/2010	3:26:05 PM	BCl3 MFC set to  0.000000
10/1/2010	3:26:05 PM	PHl3 MFC set to  0.000000
10/1/2010	3:26:05 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:26:05 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:26:05 PM	Tube furnace set to 0
10/1/2010	3:27:05 PM	Helium valve closed
10/1/2010	3:27:05 PM	H2 valve closed
10/1/2010	3:27:05 PM	BCl3 valve closed
10/1/2010	3:27:05 PM	PH3 valve closed
10/1/2010	3:27:05 PM	SiCl4 pre valve closed
10/1/2010	3:27:05 PM	SiCl4 post valve closed
10/1/2010	3:27:05 PM	Bubbler valve closed
10/1/2010	3:27:05 PM	Main Vac valve opened
10/1/2010	3:27:05 PM	Bypass valve opened
10/1/2010	3:27:05 PM	Helium MFC set to  0.000000
10/1/2010	3:27:05 PM	H2 MFC set to  0.000000
10/1/2010	3:27:05 PM	BCl3 MFC set to  0.000000
10/1/2010	3:27:05 PM	PHl3 MFC set to  0.000000
10/1/2010	3:27:05 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:27:05 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:27:05 PM	Tube furnace set to 0
10/1/2010	3:28:05 PM	H2 valve closed
10/1/2010	3:28:05 PM	BCl3 valve closed
10/1/2010	3:28:05 PM	PH3 valve closed
10/1/2010	3:28:05 PM	SiCl4 pre valve closed
10/1/2010	3:28:05 PM	SiCl4 post valve closed
10/1/2010	3:28:05 PM	Bubbler valve closed
10/1/2010	3:28:05 PM	Helium valve opened
10/1/2010	3:28:05 PM	Main Vac valve opened
10/1/2010	3:28:05 PM	Bypass valve opened
10/1/2010	3:28:05 PM	Helium MFC set to  100.000000
10/1/2010	3:28:05 PM	H2 MFC set to  0.000000
10/1/2010	3:28:05 PM	BCl3 MFC set to  0.000000
10/1/2010	3:28:05 PM	PHl3 MFC set to  0.000000
10/1/2010	3:28:05 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:28:05 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:28:06 PM	Tube furnace set to 0
10/1/2010	3:29:06 PM	Helium valve closed
10/1/2010	3:29:06 PM	H2 valve closed
10/1/2010	3:29:06 PM	BCl3 valve closed
10/1/2010	3:29:06 PM	PH3 valve closed
10/1/2010	3:29:06 PM	SiCl4 pre valve closed
10/1/2010	3:29:06 PM	SiCl4 post valve closed
10/1/2010	3:29:06 PM	Bubbler valve closed
10/1/2010	3:29:06 PM	Main Vac valve opened
10/1/2010	3:29:06 PM	Bypass valve opened
10/1/2010	3:29:06 PM	Helium MFC set to  0.000000
10/1/2010	3:29:06 PM	H2 MFC set to  0.000000
10/1/2010	3:29:06 PM	BCl3 MFC set to  0.000000
10/1/2010	3:29:06 PM	PHl3 MFC set to  0.000000
10/1/2010	3:29:06 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:29:06 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:29:06 PM	Tube furnace set to 0
10/1/2010	3:30:06 PM	H2 valve closed
10/1/2010	3:30:06 PM	BCl3 valve closed
10/1/2010	3:30:06 PM	PH3 valve closed
10/1/2010	3:30:06 PM	SiCl4 pre valve closed
10/1/2010	3:30:06 PM	SiCl4 post valve closed
10/1/2010	3:30:06 PM	Bubbler valve closed
10/1/2010	3:30:06 PM	Helium valve opened
10/1/2010	3:30:06 PM	Main Vac valve opened
10/1/2010	3:30:06 PM	Bypass valve opened
10/1/2010	3:30:06 PM	Helium MFC set to  100.000000
10/1/2010	3:30:06 PM	H2 MFC set to  0.000000
10/1/2010	3:30:06 PM	BCl3 MFC set to  0.000000
10/1/2010	3:30:06 PM	PHl3 MFC set to  0.000000
10/1/2010	3:30:06 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:30:06 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:30:06 PM	Tube furnace set to 0
10/1/2010	3:31:06 PM	Helium valve closed
10/1/2010	3:31:06 PM	H2 valve closed
10/1/2010	3:31:06 PM	BCl3 valve closed
10/1/2010	3:31:06 PM	PH3 valve closed
10/1/2010	3:31:06 PM	SiCl4 pre valve closed
10/1/2010	3:31:06 PM	SiCl4 post valve closed
10/1/2010	3:31:06 PM	Bubbler valve closed
10/1/2010	3:31:06 PM	Main Vac valve opened
10/1/2010	3:31:06 PM	Bypass valve opened
10/1/2010	3:31:06 PM	Helium MFC set to  0.000000
10/1/2010	3:31:06 PM	H2 MFC set to  0.000000
10/1/2010	3:31:06 PM	BCl3 MFC set to  0.000000
10/1/2010	3:31:06 PM	PHl3 MFC set to  0.000000
10/1/2010	3:31:06 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:31:06 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:31:06 PM	Tube furnace set to 0
10/1/2010	3:32:06 PM	H2 valve closed
10/1/2010	3:32:06 PM	BCl3 valve closed
10/1/2010	3:32:06 PM	PH3 valve closed
10/1/2010	3:32:06 PM	SiCl4 pre valve closed
10/1/2010	3:32:06 PM	SiCl4 post valve closed
10/1/2010	3:32:06 PM	Bubbler valve closed
10/1/2010	3:32:06 PM	Helium valve opened
10/1/2010	3:32:06 PM	Main Vac valve opened
10/1/2010	3:32:06 PM	Bypass valve opened
10/1/2010	3:32:06 PM	Helium MFC set to  100.000000
10/1/2010	3:32:06 PM	H2 MFC set to  0.000000
10/1/2010	3:32:06 PM	BCl3 MFC set to  0.000000
10/1/2010	3:32:06 PM	PHl3 MFC set to  0.000000
10/1/2010	3:32:06 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:32:06 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:32:06 PM	Tube furnace set to 0
10/1/2010	3:33:06 PM	Helium valve closed
10/1/2010	3:33:06 PM	H2 valve closed
10/1/2010	3:33:06 PM	BCl3 valve closed
10/1/2010	3:33:06 PM	PH3 valve closed
10/1/2010	3:33:06 PM	SiCl4 pre valve closed
10/1/2010	3:33:06 PM	SiCl4 post valve closed
10/1/2010	3:33:06 PM	Bubbler valve closed
10/1/2010	3:33:06 PM	Main Vac valve opened
10/1/2010	3:33:06 PM	Bypass valve opened
10/1/2010	3:33:06 PM	Helium MFC set to  0.000000
10/1/2010	3:33:06 PM	H2 MFC set to  0.000000
10/1/2010	3:33:06 PM	BCl3 MFC set to  0.000000
10/1/2010	3:33:06 PM	PHl3 MFC set to  0.000000
10/1/2010	3:33:06 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:33:06 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:33:07 PM	Tube furnace set to 0
10/1/2010	3:34:07 PM	H2 valve closed
10/1/2010	3:34:07 PM	BCl3 valve closed
10/1/2010	3:34:07 PM	PH3 valve closed
10/1/2010	3:34:07 PM	SiCl4 pre valve closed
10/1/2010	3:34:07 PM	SiCl4 post valve closed
10/1/2010	3:34:07 PM	Bubbler valve closed
10/1/2010	3:34:07 PM	Helium valve opened
10/1/2010	3:34:07 PM	Main Vac valve opened
10/1/2010	3:34:07 PM	Bypass valve opened
10/1/2010	3:34:07 PM	Helium MFC set to  100.000000
10/1/2010	3:34:07 PM	H2 MFC set to  0.000000
10/1/2010	3:34:07 PM	BCl3 MFC set to  0.000000
10/1/2010	3:34:07 PM	PHl3 MFC set to  0.000000
10/1/2010	3:34:07 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:34:07 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:34:07 PM	Tube furnace set to 0
10/1/2010	3:35:07 PM	Helium valve closed
10/1/2010	3:35:07 PM	H2 valve closed
10/1/2010	3:35:07 PM	BCl3 valve closed
10/1/2010	3:35:07 PM	PH3 valve closed
10/1/2010	3:35:07 PM	SiCl4 pre valve closed
10/1/2010	3:35:07 PM	SiCl4 post valve closed
10/1/2010	3:35:07 PM	Bubbler valve closed
10/1/2010	3:35:07 PM	Main Vac valve opened
10/1/2010	3:35:07 PM	Bypass valve opened
10/1/2010	3:35:07 PM	Helium MFC set to  0.000000
10/1/2010	3:35:07 PM	H2 MFC set to  0.000000
10/1/2010	3:35:07 PM	BCl3 MFC set to  0.000000
10/1/2010	3:35:07 PM	PHl3 MFC set to  0.000000
10/1/2010	3:35:07 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:35:07 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:35:07 PM	Tube furnace set to 0
10/1/2010	3:36:07 PM	H2 valve closed
10/1/2010	3:36:07 PM	BCl3 valve closed
10/1/2010	3:36:07 PM	PH3 valve closed
10/1/2010	3:36:07 PM	SiCl4 pre valve closed
10/1/2010	3:36:07 PM	SiCl4 post valve closed
10/1/2010	3:36:07 PM	Bubbler valve closed
10/1/2010	3:36:07 PM	Helium valve opened
10/1/2010	3:36:07 PM	Main Vac valve opened
10/1/2010	3:36:07 PM	Bypass valve opened
10/1/2010	3:36:07 PM	Helium MFC set to  100.000000
10/1/2010	3:36:07 PM	H2 MFC set to  0.000000
10/1/2010	3:36:07 PM	BCl3 MFC set to  0.000000
10/1/2010	3:36:07 PM	PHl3 MFC set to  0.000000
10/1/2010	3:36:07 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:36:07 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:36:07 PM	Tube furnace set to 0
10/1/2010	3:37:07 PM	Helium valve closed
10/1/2010	3:37:07 PM	H2 valve closed
10/1/2010	3:37:07 PM	BCl3 valve closed
10/1/2010	3:37:07 PM	PH3 valve closed
10/1/2010	3:37:07 PM	SiCl4 pre valve closed
10/1/2010	3:37:07 PM	SiCl4 post valve closed
10/1/2010	3:37:07 PM	Bubbler valve closed
10/1/2010	3:37:07 PM	Main Vac valve opened
10/1/2010	3:37:07 PM	Bypass valve opened
10/1/2010	3:37:07 PM	Helium MFC set to  0.000000
10/1/2010	3:37:07 PM	H2 MFC set to  0.000000
10/1/2010	3:37:07 PM	BCl3 MFC set to  0.000000
10/1/2010	3:37:07 PM	PHl3 MFC set to  0.000000
10/1/2010	3:37:07 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:37:07 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:37:07 PM	Tube furnace set to 0
10/1/2010	3:37:08 PM	Run finished at 3:37 PM
10/1/2010	3:37:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	3:40:08 PM	Helium MFC set to  100.000000
10/1/2010	3:40:09 PM	Helium valve opened
10/1/2010	3:43:23 PM	Helium valve closed
10/1/2010	3:43:25 PM	Helium MFC set to  0.000000
10/1/2010	3:43:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	3:43:27 PM	Recipe started at 3:43 PM
10/1/2010	3:43:27 PM	Helium valve closed
10/1/2010	3:43:27 PM	H2 valve closed
10/1/2010	3:43:27 PM	BCl3 valve closed
10/1/2010	3:43:27 PM	PH3 valve closed
10/1/2010	3:43:27 PM	SiCl4 pre valve closed
10/1/2010	3:43:27 PM	SiCl4 post valve closed
10/1/2010	3:43:27 PM	Main Vac valve closed
10/1/2010	3:43:27 PM	Bubbler valve closed
10/1/2010	3:43:27 PM	Bypass valve opened
10/1/2010	3:43:27 PM	Helium MFC set to  0.000000
10/1/2010	3:43:27 PM	H2 MFC set to  0.000000
10/1/2010	3:43:27 PM	BCl3 MFC set to  0.000000
10/1/2010	3:43:27 PM	PHl3 MFC set to  0.000000
10/1/2010	3:43:27 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:43:27 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:43:27 PM	Tube furnace set to 0
10/1/2010	3:43:28 PM	Helium valve closed
10/1/2010	3:43:28 PM	H2 valve closed
10/1/2010	3:43:28 PM	BCl3 valve closed
10/1/2010	3:43:28 PM	PH3 valve closed
10/1/2010	3:43:28 PM	SiCl4 pre valve closed
10/1/2010	3:43:28 PM	SiCl4 post valve closed
10/1/2010	3:43:28 PM	Bubbler valve closed
10/1/2010	3:43:28 PM	Main Vac valve opened
10/1/2010	3:43:28 PM	Bypass valve opened
10/1/2010	3:43:28 PM	Helium MFC set to  0.000000
10/1/2010	3:43:28 PM	H2 MFC set to  0.000000
10/1/2010	3:43:28 PM	BCl3 MFC set to  0.000000
10/1/2010	3:43:28 PM	PHl3 MFC set to  0.000000
10/1/2010	3:43:28 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:43:28 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:43:28 PM	Tube furnace set to 0
10/1/2010	3:43:28 PM	Run finished at 3:43 PM
10/1/2010	3:43:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	3:44:09 PM	Helium MFC set to  100.000000
10/1/2010	3:44:10 PM	Helium valve opened
10/1/2010	3:46:35 PM	Helium valve closed
10/1/2010	3:46:39 PM	Helium MFC set to  0.000000
10/1/2010	3:46:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	3:46:41 PM	Recipe started at 3:46 PM
10/1/2010	3:46:41 PM	Helium valve closed
10/1/2010	3:46:41 PM	H2 valve closed
10/1/2010	3:46:41 PM	BCl3 valve closed
10/1/2010	3:46:41 PM	PH3 valve closed
10/1/2010	3:46:41 PM	SiCl4 pre valve closed
10/1/2010	3:46:41 PM	SiCl4 post valve closed
10/1/2010	3:46:41 PM	Main Vac valve closed
10/1/2010	3:46:41 PM	Bubbler valve closed
10/1/2010	3:46:41 PM	Bypass valve opened
10/1/2010	3:46:41 PM	Helium MFC set to  0.000000
10/1/2010	3:46:41 PM	H2 MFC set to  0.000000
10/1/2010	3:46:41 PM	BCl3 MFC set to  0.000000
10/1/2010	3:46:41 PM	PHl3 MFC set to  0.000000
10/1/2010	3:46:41 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:46:41 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:46:41 PM	Tube furnace set to 0
10/1/2010	3:46:41 PM	Helium valve closed
10/1/2010	3:46:41 PM	H2 valve closed
10/1/2010	3:46:41 PM	BCl3 valve closed
10/1/2010	3:46:41 PM	PH3 valve closed
10/1/2010	3:46:41 PM	SiCl4 pre valve closed
10/1/2010	3:46:41 PM	SiCl4 post valve closed
10/1/2010	3:46:41 PM	Bubbler valve closed
10/1/2010	3:46:41 PM	Main Vac valve opened
10/1/2010	3:46:41 PM	Bypass valve opened
10/1/2010	3:46:41 PM	Helium MFC set to  0.000000
10/1/2010	3:46:41 PM	H2 MFC set to  0.000000
10/1/2010	3:46:41 PM	BCl3 MFC set to  0.000000
10/1/2010	3:46:41 PM	PHl3 MFC set to  0.000000
10/1/2010	3:46:41 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:46:41 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:46:41 PM	Tube furnace set to 0
10/1/2010	3:46:41 PM	Run finished at 3:46 PM
10/1/2010	3:46:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	3:47:31 PM	Helium MFC set to  100.000000
10/1/2010	3:47:32 PM	Helium valve opened
10/1/2010	3:48:43 PM	Helium valve closed
10/1/2010	3:48:45 PM	Helium MFC set to  0.000000
10/1/2010	3:48:48 PM	PHl3 MFC set to  0.000000
10/1/2010	3:48:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	3:48:50 PM	Recipe started at 3:48 PM
10/1/2010	3:48:50 PM	Helium valve closed
10/1/2010	3:48:50 PM	H2 valve closed
10/1/2010	3:48:50 PM	BCl3 valve closed
10/1/2010	3:48:50 PM	PH3 valve closed
10/1/2010	3:48:50 PM	SiCl4 pre valve closed
10/1/2010	3:48:50 PM	SiCl4 post valve closed
10/1/2010	3:48:50 PM	Main Vac valve closed
10/1/2010	3:48:50 PM	Bubbler valve closed
10/1/2010	3:48:50 PM	Bypass valve opened
10/1/2010	3:48:50 PM	Helium MFC set to  0.000000
10/1/2010	3:48:50 PM	H2 MFC set to  0.000000
10/1/2010	3:48:50 PM	BCl3 MFC set to  0.000000
10/1/2010	3:48:50 PM	PHl3 MFC set to  0.000000
10/1/2010	3:48:50 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:48:50 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:48:50 PM	Tube furnace set to 0
10/1/2010	3:48:50 PM	Helium valve closed
10/1/2010	3:48:50 PM	H2 valve closed
10/1/2010	3:48:50 PM	BCl3 valve closed
10/1/2010	3:48:50 PM	PH3 valve closed
10/1/2010	3:48:50 PM	SiCl4 pre valve closed
10/1/2010	3:48:50 PM	SiCl4 post valve closed
10/1/2010	3:48:50 PM	Bubbler valve closed
10/1/2010	3:48:50 PM	Main Vac valve opened
10/1/2010	3:48:50 PM	Bypass valve opened
10/1/2010	3:48:50 PM	Helium MFC set to  0.000000
10/1/2010	3:48:50 PM	H2 MFC set to  0.000000
10/1/2010	3:48:50 PM	BCl3 MFC set to  0.000000
10/1/2010	3:48:50 PM	PHl3 MFC set to  0.000000
10/1/2010	3:48:50 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:48:50 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:48:51 PM	Tube furnace set to 0
10/1/2010	3:48:51 PM	Run finished at 3:48 PM
10/1/2010	3:48:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	3:50:24 PM	Helium MFC set to  100.000000
10/1/2010	3:50:25 PM	Helium valve opened
10/1/2010	3:53:38 PM	Helium valve closed
10/1/2010	3:53:41 PM	Helium MFC set to  0.000000
10/1/2010	3:54:31 PM	Helium MFC set to  100.000000
10/1/2010	3:54:33 PM	Helium valve opened
10/1/2010	3:55:57 PM	Helium valve closed
10/1/2010	3:55:59 PM	Helium MFC set to  0.000000
10/1/2010	3:56:44 PM	Recipe started at 3:56 PM
10/1/2010	3:56:44 PM	Helium valve closed
10/1/2010	3:56:44 PM	BCl3 valve closed
10/1/2010	3:56:44 PM	PH3 valve closed
10/1/2010	3:56:44 PM	SiCl4 pre valve closed
10/1/2010	3:56:44 PM	SiCl4 post valve closed
10/1/2010	3:56:44 PM	Main Vac valve closed
10/1/2010	3:56:44 PM	Bypass valve closed
10/1/2010	3:56:44 PM	Bubbler valve closed
10/1/2010	3:56:44 PM	H2 valve opened
10/1/2010	3:56:44 PM	Helium MFC set to  0.000000
10/1/2010	3:56:44 PM	H2 MFC set to  500.000000
10/1/2010	3:56:44 PM	BCl3 MFC set to  0.000000
10/1/2010	3:56:44 PM	PHl3 MFC set to  0.000000
10/1/2010	3:56:44 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:56:44 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:56:44 PM	Tube furnace set to 1000
10/1/2010	3:58:02 PM	Helium valve closed
10/1/2010	3:58:02 PM	BCl3 valve closed
10/1/2010	3:58:02 PM	PH3 valve closed
10/1/2010	3:58:02 PM	SiCl4 pre valve closed
10/1/2010	3:58:02 PM	SiCl4 post valve closed
10/1/2010	3:58:02 PM	Main Vac valve closed
10/1/2010	3:58:02 PM	Bypass valve closed
10/1/2010	3:58:02 PM	H2 valve opened
10/1/2010	3:58:02 PM	Bubbler valve opened
10/1/2010	3:58:02 PM	Helium MFC set to  0.000000
10/1/2010	3:58:02 PM	H2 MFC set to  500.000000
10/1/2010	3:58:02 PM	BCl3 MFC set to  0.000000
10/1/2010	3:58:02 PM	PHl3 MFC set to  0.000000
10/1/2010	3:58:02 PM	SiCl4 MFC set to  0.000000
10/1/2010	3:58:02 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	3:58:02 PM	Tube furnace set to 1000
10/1/2010	4:18:02 PM	Helium valve closed
10/1/2010	4:18:02 PM	PH3 valve closed
10/1/2010	4:18:02 PM	Main Vac valve closed
10/1/2010	4:18:02 PM	Bypass valve closed
10/1/2010	4:18:02 PM	H2 valve opened
10/1/2010	4:18:02 PM	BCl3 valve opened
10/1/2010	4:18:02 PM	SiCl4 pre valve opened
10/1/2010	4:18:02 PM	SiCl4 post valve opened
10/1/2010	4:18:02 PM	Bubbler valve opened
10/1/2010	4:18:02 PM	Helium MFC set to  0.000000
10/1/2010	4:18:02 PM	H2 MFC set to  500.000000
10/1/2010	4:18:02 PM	BCl3 MFC set to  12.000000
10/1/2010	4:18:02 PM	PHl3 MFC set to  0.000000
10/1/2010	4:18:02 PM	SiCl4 MFC set to  50.000000
10/1/2010	4:18:02 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	4:18:02 PM	Tube furnace set to 1000
10/1/2010	4:31:22 PM	Helium valve closed
10/1/2010	4:31:22 PM	BCl3 valve closed
10/1/2010	4:31:22 PM	PH3 valve closed
10/1/2010	4:31:22 PM	SiCl4 pre valve closed
10/1/2010	4:31:22 PM	SiCl4 post valve closed
10/1/2010	4:31:22 PM	Main Vac valve closed
10/1/2010	4:31:22 PM	Bypass valve closed
10/1/2010	4:31:22 PM	H2 valve opened
10/1/2010	4:31:22 PM	Bubbler valve opened
10/1/2010	4:31:22 PM	Helium MFC set to  0.000000
10/1/2010	4:31:22 PM	H2 MFC set to  500.000000
10/1/2010	4:31:22 PM	BCl3 MFC set to  0.000000
10/1/2010	4:31:22 PM	PHl3 MFC set to  0.000000
10/1/2010	4:31:22 PM	SiCl4 MFC set to  0.000000
10/1/2010	4:31:22 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	4:31:22 PM	Tube furnace set to 750
10/1/2010	4:51:44 PM	H2 valve closed
10/1/2010	4:51:44 PM	BCl3 valve closed
10/1/2010	4:51:44 PM	PH3 valve closed
10/1/2010	4:51:44 PM	SiCl4 pre valve closed
10/1/2010	4:51:44 PM	SiCl4 post valve closed
10/1/2010	4:51:44 PM	Main Vac valve closed
10/1/2010	4:51:44 PM	Bypass valve closed
10/1/2010	4:51:44 PM	Helium valve opened
10/1/2010	4:51:44 PM	Bubbler valve opened
10/1/2010	4:51:44 PM	Helium MFC set to  500.000000
10/1/2010	4:51:44 PM	H2 MFC set to  0.000000
10/1/2010	4:51:44 PM	BCl3 MFC set to  0.000000
10/1/2010	4:51:44 PM	PHl3 MFC set to  0.000000
10/1/2010	4:51:44 PM	SiCl4 MFC set to  0.000000
10/1/2010	4:51:44 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	4:51:44 PM	Tube furnace set to 0
10/1/2010	5:09:31 PM	Run aborted at 5:09 PM
10/1/2010	5:09:31 PM	Helium valve closed
10/1/2010	5:09:31 PM	H2 valve closed
10/1/2010	5:09:31 PM	BCl3 valve closed
10/1/2010	5:09:31 PM	PH3 valve closed
10/1/2010	5:09:31 PM	SiCl4 pre valve closed
10/1/2010	5:09:31 PM	SiCl4 post valve closed
10/1/2010	5:09:31 PM	Bypass valve closed
10/1/2010	5:09:31 PM	Main Vac valve closed
10/1/2010	5:09:31 PM	Bubbler valve closed
10/1/2010	5:09:31 PM	Helium MFC set to  0.000000
10/1/2010	5:09:31 PM	H2 MFC set to  0.000000
10/1/2010	5:09:31 PM	BCl3 MFC set to  0.000000
10/1/2010	5:09:31 PM	PHl3 MFC set to  0.000000
10/1/2010	5:09:31 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:09:31 PM	Tube furnace set to 0
10/1/2010	5:09:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2010	5:09:35 PM	Recipe started at 5:09 PM
10/1/2010	5:09:35 PM	H2 valve closed
10/1/2010	5:09:35 PM	BCl3 valve closed
10/1/2010	5:09:35 PM	PH3 valve closed
10/1/2010	5:09:35 PM	SiCl4 pre valve closed
10/1/2010	5:09:35 PM	SiCl4 post valve closed
10/1/2010	5:09:35 PM	Main Vac valve closed
10/1/2010	5:09:35 PM	Bypass valve closed
10/1/2010	5:09:35 PM	Bubbler valve closed
10/1/2010	5:09:35 PM	Helium valve opened
10/1/2010	5:09:35 PM	Helium MFC set to  500.000000
10/1/2010	5:09:35 PM	H2 MFC set to  0.000000
10/1/2010	5:09:35 PM	BCl3 MFC set to  0.000000
10/1/2010	5:09:35 PM	PHl3 MFC set to  0.000000
10/1/2010	5:09:35 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:09:35 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:09:35 PM	Tube furnace set to 0
10/1/2010	5:09:35 PM	Helium valve closed
10/1/2010	5:09:35 PM	H2 valve closed
10/1/2010	5:09:35 PM	BCl3 valve closed
10/1/2010	5:09:35 PM	PH3 valve closed
10/1/2010	5:09:35 PM	SiCl4 pre valve closed
10/1/2010	5:09:35 PM	SiCl4 post valve closed
10/1/2010	5:09:35 PM	Main Vac valve closed
10/1/2010	5:09:35 PM	Bypass valve closed
10/1/2010	5:09:35 PM	Bubbler valve closed
10/1/2010	5:09:35 PM	Helium MFC set to  0.000000
10/1/2010	5:09:35 PM	H2 MFC set to  0.000000
10/1/2010	5:09:35 PM	BCl3 MFC set to  0.000000
10/1/2010	5:09:35 PM	PHl3 MFC set to  0.000000
10/1/2010	5:09:35 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:09:35 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:09:35 PM	Tube furnace set to 0
10/1/2010	5:09:36 PM	Run finished at 5:09 PM
10/1/2010	5:09:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2010	5:17:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	5:17:04 PM	Recipe started at 5:17 PM
10/1/2010	5:17:04 PM	Helium valve closed
10/1/2010	5:17:04 PM	H2 valve closed
10/1/2010	5:17:04 PM	BCl3 valve closed
10/1/2010	5:17:04 PM	PH3 valve closed
10/1/2010	5:17:04 PM	SiCl4 pre valve closed
10/1/2010	5:17:04 PM	SiCl4 post valve closed
10/1/2010	5:17:04 PM	Main Vac valve closed
10/1/2010	5:17:04 PM	Bubbler valve closed
10/1/2010	5:17:04 PM	Bypass valve opened
10/1/2010	5:17:04 PM	Helium MFC set to  0.000000
10/1/2010	5:17:04 PM	H2 MFC set to  0.000000
10/1/2010	5:17:04 PM	BCl3 MFC set to  0.000000
10/1/2010	5:17:04 PM	PHl3 MFC set to  0.000000
10/1/2010	5:17:04 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:17:04 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:17:04 PM	Tube furnace set to 0
10/1/2010	5:17:47 PM	Helium valve closed
10/1/2010	5:17:47 PM	H2 valve closed
10/1/2010	5:17:47 PM	BCl3 valve closed
10/1/2010	5:17:47 PM	PH3 valve closed
10/1/2010	5:17:47 PM	SiCl4 pre valve closed
10/1/2010	5:17:47 PM	SiCl4 post valve closed
10/1/2010	5:17:47 PM	Bubbler valve closed
10/1/2010	5:17:47 PM	Main Vac valve opened
10/1/2010	5:17:47 PM	Bypass valve opened
10/1/2010	5:17:47 PM	Helium MFC set to  0.000000
10/1/2010	5:17:47 PM	H2 MFC set to  0.000000
10/1/2010	5:17:47 PM	BCl3 MFC set to  0.000000
10/1/2010	5:17:47 PM	PHl3 MFC set to  0.000000
10/1/2010	5:17:47 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:17:47 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:17:47 PM	Tube furnace set to 0
10/1/2010	5:17:48 PM	Run finished at 5:17 PM
10/1/2010	5:17:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	5:18:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	5:18:52 PM	Recipe started at 5:18 PM
10/1/2010	5:18:52 PM	Helium valve closed
10/1/2010	5:18:52 PM	H2 valve closed
10/1/2010	5:18:52 PM	BCl3 valve closed
10/1/2010	5:18:52 PM	PH3 valve closed
10/1/2010	5:18:52 PM	SiCl4 pre valve closed
10/1/2010	5:18:52 PM	SiCl4 post valve closed
10/1/2010	5:18:52 PM	Main Vac valve closed
10/1/2010	5:18:52 PM	Bubbler valve closed
10/1/2010	5:18:52 PM	Bypass valve opened
10/1/2010	5:18:52 PM	Helium MFC set to  0.000000
10/1/2010	5:18:52 PM	H2 MFC set to  0.000000
10/1/2010	5:18:52 PM	BCl3 MFC set to  0.000000
10/1/2010	5:18:52 PM	PHl3 MFC set to  0.000000
10/1/2010	5:18:52 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:18:52 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:18:52 PM	Tube furnace set to 0
10/1/2010	5:18:52 PM	Helium valve closed
10/1/2010	5:18:53 PM	H2 valve closed
10/1/2010	5:18:53 PM	BCl3 valve closed
10/1/2010	5:18:53 PM	PH3 valve closed
10/1/2010	5:18:53 PM	SiCl4 pre valve closed
10/1/2010	5:18:53 PM	SiCl4 post valve closed
10/1/2010	5:18:53 PM	Bubbler valve closed
10/1/2010	5:18:53 PM	Main Vac valve opened
10/1/2010	5:18:53 PM	Bypass valve opened
10/1/2010	5:18:53 PM	Helium MFC set to  0.000000
10/1/2010	5:18:53 PM	H2 MFC set to  0.000000
10/1/2010	5:18:53 PM	BCl3 MFC set to  0.000000
10/1/2010	5:18:53 PM	PHl3 MFC set to  0.000000
10/1/2010	5:18:53 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:18:53 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:18:53 PM	Tube furnace set to 0
10/1/2010	5:19:53 PM	H2 valve closed
10/1/2010	5:19:53 PM	BCl3 valve closed
10/1/2010	5:19:53 PM	PH3 valve closed
10/1/2010	5:19:53 PM	SiCl4 pre valve closed
10/1/2010	5:19:53 PM	SiCl4 post valve closed
10/1/2010	5:19:53 PM	Bubbler valve closed
10/1/2010	5:19:53 PM	Helium valve opened
10/1/2010	5:19:53 PM	Main Vac valve opened
10/1/2010	5:19:53 PM	Bypass valve opened
10/1/2010	5:19:53 PM	Helium MFC set to  100.000000
10/1/2010	5:19:53 PM	H2 MFC set to  0.000000
10/1/2010	5:19:53 PM	BCl3 MFC set to  0.000000
10/1/2010	5:19:53 PM	PHl3 MFC set to  0.000000
10/1/2010	5:19:53 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:19:53 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:19:53 PM	Tube furnace set to 0
10/1/2010	5:20:53 PM	Helium valve closed
10/1/2010	5:20:53 PM	H2 valve closed
10/1/2010	5:20:53 PM	BCl3 valve closed
10/1/2010	5:20:53 PM	PH3 valve closed
10/1/2010	5:20:53 PM	SiCl4 pre valve closed
10/1/2010	5:20:53 PM	SiCl4 post valve closed
10/1/2010	5:20:53 PM	Bubbler valve closed
10/1/2010	5:20:53 PM	Main Vac valve opened
10/1/2010	5:20:53 PM	Bypass valve opened
10/1/2010	5:20:53 PM	Helium MFC set to  0.000000
10/1/2010	5:20:53 PM	H2 MFC set to  0.000000
10/1/2010	5:20:53 PM	BCl3 MFC set to  0.000000
10/1/2010	5:20:53 PM	PHl3 MFC set to  0.000000
10/1/2010	5:20:53 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:20:53 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:20:53 PM	Tube furnace set to 0
10/1/2010	5:21:53 PM	H2 valve closed
10/1/2010	5:21:53 PM	BCl3 valve closed
10/1/2010	5:21:53 PM	PH3 valve closed
10/1/2010	5:21:53 PM	SiCl4 pre valve closed
10/1/2010	5:21:53 PM	SiCl4 post valve closed
10/1/2010	5:21:53 PM	Bubbler valve closed
10/1/2010	5:21:53 PM	Helium valve opened
10/1/2010	5:21:53 PM	Main Vac valve opened
10/1/2010	5:21:53 PM	Bypass valve opened
10/1/2010	5:21:53 PM	Helium MFC set to  100.000000
10/1/2010	5:21:53 PM	H2 MFC set to  0.000000
10/1/2010	5:21:53 PM	BCl3 MFC set to  0.000000
10/1/2010	5:21:53 PM	PHl3 MFC set to  0.000000
10/1/2010	5:21:53 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:21:53 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:21:53 PM	Tube furnace set to 0
10/1/2010	5:22:53 PM	Helium valve closed
10/1/2010	5:22:53 PM	H2 valve closed
10/1/2010	5:22:53 PM	BCl3 valve closed
10/1/2010	5:22:53 PM	PH3 valve closed
10/1/2010	5:22:53 PM	SiCl4 pre valve closed
10/1/2010	5:22:53 PM	SiCl4 post valve closed
10/1/2010	5:22:53 PM	Bubbler valve closed
10/1/2010	5:22:53 PM	Main Vac valve opened
10/1/2010	5:22:53 PM	Bypass valve opened
10/1/2010	5:22:53 PM	Helium MFC set to  0.000000
10/1/2010	5:22:53 PM	H2 MFC set to  0.000000
10/1/2010	5:22:53 PM	BCl3 MFC set to  0.000000
10/1/2010	5:22:53 PM	PHl3 MFC set to  0.000000
10/1/2010	5:22:53 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:22:53 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:22:53 PM	Tube furnace set to 0
10/1/2010	5:23:54 PM	H2 valve closed
10/1/2010	5:23:54 PM	BCl3 valve closed
10/1/2010	5:23:54 PM	PH3 valve closed
10/1/2010	5:23:54 PM	SiCl4 pre valve closed
10/1/2010	5:23:54 PM	SiCl4 post valve closed
10/1/2010	5:23:54 PM	Bubbler valve closed
10/1/2010	5:23:54 PM	Helium valve opened
10/1/2010	5:23:54 PM	Main Vac valve opened
10/1/2010	5:23:54 PM	Bypass valve opened
10/1/2010	5:23:54 PM	Helium MFC set to  100.000000
10/1/2010	5:23:54 PM	H2 MFC set to  0.000000
10/1/2010	5:23:54 PM	BCl3 MFC set to  0.000000
10/1/2010	5:23:54 PM	PHl3 MFC set to  0.000000
10/1/2010	5:23:54 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:23:54 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:23:54 PM	Tube furnace set to 0
10/1/2010	5:24:54 PM	Helium valve closed
10/1/2010	5:24:54 PM	H2 valve closed
10/1/2010	5:24:54 PM	BCl3 valve closed
10/1/2010	5:24:54 PM	PH3 valve closed
10/1/2010	5:24:54 PM	SiCl4 pre valve closed
10/1/2010	5:24:54 PM	SiCl4 post valve closed
10/1/2010	5:24:54 PM	Bubbler valve closed
10/1/2010	5:24:54 PM	Main Vac valve opened
10/1/2010	5:24:54 PM	Bypass valve opened
10/1/2010	5:24:54 PM	Helium MFC set to  0.000000
10/1/2010	5:24:54 PM	H2 MFC set to  0.000000
10/1/2010	5:24:54 PM	BCl3 MFC set to  0.000000
10/1/2010	5:24:54 PM	PHl3 MFC set to  0.000000
10/1/2010	5:24:54 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:24:54 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:24:54 PM	Tube furnace set to 0
10/1/2010	5:25:54 PM	H2 valve closed
10/1/2010	5:25:54 PM	BCl3 valve closed
10/1/2010	5:25:54 PM	PH3 valve closed
10/1/2010	5:25:54 PM	SiCl4 pre valve closed
10/1/2010	5:25:54 PM	SiCl4 post valve closed
10/1/2010	5:25:54 PM	Bubbler valve closed
10/1/2010	5:25:54 PM	Helium valve opened
10/1/2010	5:25:54 PM	Main Vac valve opened
10/1/2010	5:25:54 PM	Bypass valve opened
10/1/2010	5:25:54 PM	Helium MFC set to  100.000000
10/1/2010	5:25:54 PM	H2 MFC set to  0.000000
10/1/2010	5:25:54 PM	BCl3 MFC set to  0.000000
10/1/2010	5:25:54 PM	PHl3 MFC set to  0.000000
10/1/2010	5:25:54 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:25:54 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:25:54 PM	Tube furnace set to 0
10/1/2010	5:26:54 PM	Helium valve closed
10/1/2010	5:26:54 PM	H2 valve closed
10/1/2010	5:26:54 PM	BCl3 valve closed
10/1/2010	5:26:54 PM	PH3 valve closed
10/1/2010	5:26:54 PM	SiCl4 pre valve closed
10/1/2010	5:26:54 PM	SiCl4 post valve closed
10/1/2010	5:26:54 PM	Bubbler valve closed
10/1/2010	5:26:54 PM	Main Vac valve opened
10/1/2010	5:26:54 PM	Bypass valve opened
10/1/2010	5:26:54 PM	Helium MFC set to  0.000000
10/1/2010	5:26:54 PM	H2 MFC set to  0.000000
10/1/2010	5:26:54 PM	BCl3 MFC set to  0.000000
10/1/2010	5:26:54 PM	PHl3 MFC set to  0.000000
10/1/2010	5:26:54 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:26:54 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:26:54 PM	Tube furnace set to 0
10/1/2010	5:27:54 PM	H2 valve closed
10/1/2010	5:27:54 PM	BCl3 valve closed
10/1/2010	5:27:54 PM	PH3 valve closed
10/1/2010	5:27:54 PM	SiCl4 pre valve closed
10/1/2010	5:27:54 PM	SiCl4 post valve closed
10/1/2010	5:27:54 PM	Bubbler valve closed
10/1/2010	5:27:54 PM	Helium valve opened
10/1/2010	5:27:54 PM	Main Vac valve opened
10/1/2010	5:27:54 PM	Bypass valve opened
10/1/2010	5:27:54 PM	Helium MFC set to  100.000000
10/1/2010	5:27:54 PM	H2 MFC set to  0.000000
10/1/2010	5:27:54 PM	BCl3 MFC set to  0.000000
10/1/2010	5:27:54 PM	PHl3 MFC set to  0.000000
10/1/2010	5:27:54 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:27:54 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:27:55 PM	Tube furnace set to 0
10/1/2010	5:28:55 PM	Helium valve closed
10/1/2010	5:28:55 PM	H2 valve closed
10/1/2010	5:28:55 PM	BCl3 valve closed
10/1/2010	5:28:55 PM	PH3 valve closed
10/1/2010	5:28:55 PM	SiCl4 pre valve closed
10/1/2010	5:28:55 PM	SiCl4 post valve closed
10/1/2010	5:28:55 PM	Bubbler valve closed
10/1/2010	5:28:55 PM	Main Vac valve opened
10/1/2010	5:28:55 PM	Bypass valve opened
10/1/2010	5:28:55 PM	Helium MFC set to  0.000000
10/1/2010	5:28:55 PM	H2 MFC set to  0.000000
10/1/2010	5:28:55 PM	BCl3 MFC set to  0.000000
10/1/2010	5:28:55 PM	PHl3 MFC set to  0.000000
10/1/2010	5:28:55 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:28:55 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:28:55 PM	Tube furnace set to 0
10/1/2010	5:29:55 PM	H2 valve closed
10/1/2010	5:29:55 PM	BCl3 valve closed
10/1/2010	5:29:55 PM	PH3 valve closed
10/1/2010	5:29:55 PM	SiCl4 pre valve closed
10/1/2010	5:29:55 PM	SiCl4 post valve closed
10/1/2010	5:29:55 PM	Bubbler valve closed
10/1/2010	5:29:55 PM	Helium valve opened
10/1/2010	5:29:55 PM	Main Vac valve opened
10/1/2010	5:29:55 PM	Bypass valve opened
10/1/2010	5:29:55 PM	Helium MFC set to  100.000000
10/1/2010	5:29:55 PM	H2 MFC set to  0.000000
10/1/2010	5:29:55 PM	BCl3 MFC set to  0.000000
10/1/2010	5:29:55 PM	PHl3 MFC set to  0.000000
10/1/2010	5:29:55 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:29:55 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:29:55 PM	Tube furnace set to 0
10/1/2010	5:30:55 PM	Helium valve closed
10/1/2010	5:30:55 PM	H2 valve closed
10/1/2010	5:30:55 PM	BCl3 valve closed
10/1/2010	5:30:55 PM	PH3 valve closed
10/1/2010	5:30:55 PM	SiCl4 pre valve closed
10/1/2010	5:30:55 PM	SiCl4 post valve closed
10/1/2010	5:30:55 PM	Bubbler valve closed
10/1/2010	5:30:55 PM	Main Vac valve opened
10/1/2010	5:30:55 PM	Bypass valve opened
10/1/2010	5:30:55 PM	Helium MFC set to  0.000000
10/1/2010	5:30:55 PM	H2 MFC set to  0.000000
10/1/2010	5:30:55 PM	BCl3 MFC set to  0.000000
10/1/2010	5:30:55 PM	PHl3 MFC set to  0.000000
10/1/2010	5:30:55 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:30:55 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:30:55 PM	Tube furnace set to 0
10/1/2010	5:31:55 PM	H2 valve closed
10/1/2010	5:31:55 PM	BCl3 valve closed
10/1/2010	5:31:55 PM	PH3 valve closed
10/1/2010	5:31:55 PM	SiCl4 pre valve closed
10/1/2010	5:31:55 PM	SiCl4 post valve closed
10/1/2010	5:31:55 PM	Bubbler valve closed
10/1/2010	5:31:55 PM	Helium valve opened
10/1/2010	5:31:55 PM	Main Vac valve opened
10/1/2010	5:31:55 PM	Bypass valve opened
10/1/2010	5:31:55 PM	Helium MFC set to  100.000000
10/1/2010	5:31:55 PM	H2 MFC set to  0.000000
10/1/2010	5:31:55 PM	BCl3 MFC set to  0.000000
10/1/2010	5:31:55 PM	PHl3 MFC set to  0.000000
10/1/2010	5:31:55 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:31:55 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:31:55 PM	Tube furnace set to 0
10/1/2010	5:32:55 PM	Helium valve closed
10/1/2010	5:32:55 PM	H2 valve closed
10/1/2010	5:32:55 PM	BCl3 valve closed
10/1/2010	5:32:55 PM	PH3 valve closed
10/1/2010	5:32:55 PM	SiCl4 pre valve closed
10/1/2010	5:32:55 PM	SiCl4 post valve closed
10/1/2010	5:32:55 PM	Bubbler valve closed
10/1/2010	5:32:55 PM	Main Vac valve opened
10/1/2010	5:32:55 PM	Bypass valve opened
10/1/2010	5:32:55 PM	Helium MFC set to  0.000000
10/1/2010	5:32:55 PM	H2 MFC set to  0.000000
10/1/2010	5:32:55 PM	BCl3 MFC set to  0.000000
10/1/2010	5:32:55 PM	PHl3 MFC set to  0.000000
10/1/2010	5:32:55 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:32:55 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:32:56 PM	Tube furnace set to 0
10/1/2010	5:33:56 PM	H2 valve closed
10/1/2010	5:33:56 PM	BCl3 valve closed
10/1/2010	5:33:56 PM	PH3 valve closed
10/1/2010	5:33:56 PM	SiCl4 pre valve closed
10/1/2010	5:33:56 PM	SiCl4 post valve closed
10/1/2010	5:33:56 PM	Bubbler valve closed
10/1/2010	5:33:56 PM	Helium valve opened
10/1/2010	5:33:56 PM	Main Vac valve opened
10/1/2010	5:33:56 PM	Bypass valve opened
10/1/2010	5:33:56 PM	Helium MFC set to  100.000000
10/1/2010	5:33:56 PM	H2 MFC set to  0.000000
10/1/2010	5:33:56 PM	BCl3 MFC set to  0.000000
10/1/2010	5:33:56 PM	PHl3 MFC set to  0.000000
10/1/2010	5:33:56 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:33:56 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:33:56 PM	Tube furnace set to 0
10/1/2010	5:34:56 PM	Helium valve closed
10/1/2010	5:34:56 PM	H2 valve closed
10/1/2010	5:34:56 PM	BCl3 valve closed
10/1/2010	5:34:56 PM	PH3 valve closed
10/1/2010	5:34:56 PM	SiCl4 pre valve closed
10/1/2010	5:34:56 PM	SiCl4 post valve closed
10/1/2010	5:34:56 PM	Bubbler valve closed
10/1/2010	5:34:56 PM	Main Vac valve opened
10/1/2010	5:34:56 PM	Bypass valve opened
10/1/2010	5:34:56 PM	Helium MFC set to  0.000000
10/1/2010	5:34:56 PM	H2 MFC set to  0.000000
10/1/2010	5:34:56 PM	BCl3 MFC set to  0.000000
10/1/2010	5:34:56 PM	PHl3 MFC set to  0.000000
10/1/2010	5:34:56 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:34:56 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:34:56 PM	Tube furnace set to 0
10/1/2010	5:35:56 PM	H2 valve closed
10/1/2010	5:35:56 PM	BCl3 valve closed
10/1/2010	5:35:56 PM	PH3 valve closed
10/1/2010	5:35:56 PM	SiCl4 pre valve closed
10/1/2010	5:35:56 PM	SiCl4 post valve closed
10/1/2010	5:35:56 PM	Bubbler valve closed
10/1/2010	5:35:56 PM	Helium valve opened
10/1/2010	5:35:56 PM	Main Vac valve opened
10/1/2010	5:35:56 PM	Bypass valve opened
10/1/2010	5:35:56 PM	Helium MFC set to  100.000000
10/1/2010	5:35:56 PM	H2 MFC set to  0.000000
10/1/2010	5:35:56 PM	BCl3 MFC set to  0.000000
10/1/2010	5:35:56 PM	PHl3 MFC set to  0.000000
10/1/2010	5:35:56 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:35:56 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:35:56 PM	Tube furnace set to 0
10/1/2010	5:36:56 PM	Helium valve closed
10/1/2010	5:36:56 PM	H2 valve closed
10/1/2010	5:36:56 PM	BCl3 valve closed
10/1/2010	5:36:56 PM	PH3 valve closed
10/1/2010	5:36:56 PM	SiCl4 pre valve closed
10/1/2010	5:36:56 PM	SiCl4 post valve closed
10/1/2010	5:36:56 PM	Bubbler valve closed
10/1/2010	5:36:56 PM	Main Vac valve opened
10/1/2010	5:36:56 PM	Bypass valve opened
10/1/2010	5:36:56 PM	Helium MFC set to  0.000000
10/1/2010	5:36:56 PM	H2 MFC set to  0.000000
10/1/2010	5:36:56 PM	BCl3 MFC set to  0.000000
10/1/2010	5:36:56 PM	PHl3 MFC set to  0.000000
10/1/2010	5:36:56 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:36:56 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:36:56 PM	Tube furnace set to 0
10/1/2010	5:37:56 PM	H2 valve closed
10/1/2010	5:37:56 PM	BCl3 valve closed
10/1/2010	5:37:56 PM	PH3 valve closed
10/1/2010	5:37:56 PM	SiCl4 pre valve closed
10/1/2010	5:37:56 PM	SiCl4 post valve closed
10/1/2010	5:37:56 PM	Bubbler valve closed
10/1/2010	5:37:56 PM	Helium valve opened
10/1/2010	5:37:56 PM	Main Vac valve opened
10/1/2010	5:37:56 PM	Bypass valve opened
10/1/2010	5:37:56 PM	Helium MFC set to  100.000000
10/1/2010	5:37:56 PM	H2 MFC set to  0.000000
10/1/2010	5:37:56 PM	BCl3 MFC set to  0.000000
10/1/2010	5:37:56 PM	PHl3 MFC set to  0.000000
10/1/2010	5:37:56 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:37:56 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:37:57 PM	Tube furnace set to 0
10/1/2010	5:38:57 PM	Helium valve closed
10/1/2010	5:38:57 PM	H2 valve closed
10/1/2010	5:38:57 PM	BCl3 valve closed
10/1/2010	5:38:57 PM	PH3 valve closed
10/1/2010	5:38:57 PM	SiCl4 pre valve closed
10/1/2010	5:38:57 PM	SiCl4 post valve closed
10/1/2010	5:38:57 PM	Bubbler valve closed
10/1/2010	5:38:57 PM	Main Vac valve opened
10/1/2010	5:38:57 PM	Bypass valve opened
10/1/2010	5:38:57 PM	Helium MFC set to  0.000000
10/1/2010	5:38:57 PM	H2 MFC set to  0.000000
10/1/2010	5:38:57 PM	BCl3 MFC set to  0.000000
10/1/2010	5:38:57 PM	PHl3 MFC set to  0.000000
10/1/2010	5:38:57 PM	SiCl4 MFC set to  0.000000
10/1/2010	5:38:57 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	5:38:57 PM	Tube furnace set to 0
10/1/2010	5:38:58 PM	Run finished at 5:38 PM
10/1/2010	5:38:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	6:35:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	6:35:36 PM	Recipe started at 6:35 PM
10/1/2010	6:35:36 PM	Helium valve closed
10/1/2010	6:35:36 PM	H2 valve closed
10/1/2010	6:35:37 PM	BCl3 valve closed
10/1/2010	6:35:37 PM	PH3 valve closed
10/1/2010	6:35:37 PM	SiCl4 pre valve closed
10/1/2010	6:35:37 PM	SiCl4 post valve closed
10/1/2010	6:35:37 PM	Main Vac valve closed
10/1/2010	6:35:37 PM	Bubbler valve closed
10/1/2010	6:35:37 PM	Bypass valve opened
10/1/2010	6:35:37 PM	Helium MFC set to  0.000000
10/1/2010	6:35:37 PM	H2 MFC set to  0.000000
10/1/2010	6:35:37 PM	BCl3 MFC set to  0.000000
10/1/2010	6:35:37 PM	PHl3 MFC set to  0.000000
10/1/2010	6:35:37 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:35:37 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:35:37 PM	Tube furnace set to 0
10/1/2010	6:35:37 PM	Helium valve closed
10/1/2010	6:35:37 PM	H2 valve closed
10/1/2010	6:35:37 PM	BCl3 valve closed
10/1/2010	6:35:37 PM	PH3 valve closed
10/1/2010	6:35:37 PM	SiCl4 pre valve closed
10/1/2010	6:35:37 PM	SiCl4 post valve closed
10/1/2010	6:35:37 PM	Bubbler valve closed
10/1/2010	6:35:37 PM	Main Vac valve opened
10/1/2010	6:35:37 PM	Bypass valve opened
10/1/2010	6:35:37 PM	Helium MFC set to  0.000000
10/1/2010	6:35:37 PM	H2 MFC set to  0.000000
10/1/2010	6:35:37 PM	BCl3 MFC set to  0.000000
10/1/2010	6:35:37 PM	PHl3 MFC set to  0.000000
10/1/2010	6:35:37 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:35:37 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:35:37 PM	Tube furnace set to 0
10/1/2010	6:36:37 PM	H2 valve closed
10/1/2010	6:36:37 PM	BCl3 valve closed
10/1/2010	6:36:37 PM	PH3 valve closed
10/1/2010	6:36:37 PM	SiCl4 pre valve closed
10/1/2010	6:36:37 PM	SiCl4 post valve closed
10/1/2010	6:36:37 PM	Bubbler valve closed
10/1/2010	6:36:37 PM	Helium valve opened
10/1/2010	6:36:37 PM	Main Vac valve opened
10/1/2010	6:36:37 PM	Bypass valve opened
10/1/2010	6:36:37 PM	Helium MFC set to  100.000000
10/1/2010	6:36:37 PM	H2 MFC set to  0.000000
10/1/2010	6:36:37 PM	BCl3 MFC set to  0.000000
10/1/2010	6:36:37 PM	PHl3 MFC set to  0.000000
10/1/2010	6:36:37 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:36:37 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:36:37 PM	Tube furnace set to 0
10/1/2010	6:37:37 PM	Helium valve closed
10/1/2010	6:37:37 PM	H2 valve closed
10/1/2010	6:37:37 PM	BCl3 valve closed
10/1/2010	6:37:37 PM	PH3 valve closed
10/1/2010	6:37:37 PM	SiCl4 pre valve closed
10/1/2010	6:37:37 PM	SiCl4 post valve closed
10/1/2010	6:37:37 PM	Bubbler valve closed
10/1/2010	6:37:37 PM	Main Vac valve opened
10/1/2010	6:37:37 PM	Bypass valve opened
10/1/2010	6:37:37 PM	Helium MFC set to  0.000000
10/1/2010	6:37:37 PM	H2 MFC set to  0.000000
10/1/2010	6:37:37 PM	BCl3 MFC set to  0.000000
10/1/2010	6:37:37 PM	PHl3 MFC set to  0.000000
10/1/2010	6:37:37 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:37:37 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:37:38 PM	Tube furnace set to 0
10/1/2010	6:38:38 PM	H2 valve closed
10/1/2010	6:38:38 PM	BCl3 valve closed
10/1/2010	6:38:38 PM	PH3 valve closed
10/1/2010	6:38:38 PM	SiCl4 pre valve closed
10/1/2010	6:38:38 PM	SiCl4 post valve closed
10/1/2010	6:38:38 PM	Bubbler valve closed
10/1/2010	6:38:38 PM	Helium valve opened
10/1/2010	6:38:38 PM	Main Vac valve opened
10/1/2010	6:38:38 PM	Bypass valve opened
10/1/2010	6:38:38 PM	Helium MFC set to  100.000000
10/1/2010	6:38:38 PM	H2 MFC set to  0.000000
10/1/2010	6:38:38 PM	BCl3 MFC set to  0.000000
10/1/2010	6:38:38 PM	PHl3 MFC set to  0.000000
10/1/2010	6:38:38 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:38:38 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:38:38 PM	Tube furnace set to 0
10/1/2010	6:39:38 PM	Helium valve closed
10/1/2010	6:39:38 PM	H2 valve closed
10/1/2010	6:39:38 PM	BCl3 valve closed
10/1/2010	6:39:38 PM	PH3 valve closed
10/1/2010	6:39:38 PM	SiCl4 pre valve closed
10/1/2010	6:39:38 PM	SiCl4 post valve closed
10/1/2010	6:39:38 PM	Bubbler valve closed
10/1/2010	6:39:38 PM	Main Vac valve opened
10/1/2010	6:39:38 PM	Bypass valve opened
10/1/2010	6:39:38 PM	Helium MFC set to  0.000000
10/1/2010	6:39:38 PM	H2 MFC set to  0.000000
10/1/2010	6:39:38 PM	BCl3 MFC set to  0.000000
10/1/2010	6:39:38 PM	PHl3 MFC set to  0.000000
10/1/2010	6:39:38 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:39:38 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:39:38 PM	Tube furnace set to 0
10/1/2010	6:40:38 PM	H2 valve closed
10/1/2010	6:40:38 PM	BCl3 valve closed
10/1/2010	6:40:38 PM	PH3 valve closed
10/1/2010	6:40:38 PM	SiCl4 pre valve closed
10/1/2010	6:40:38 PM	SiCl4 post valve closed
10/1/2010	6:40:38 PM	Bubbler valve closed
10/1/2010	6:40:38 PM	Helium valve opened
10/1/2010	6:40:38 PM	Main Vac valve opened
10/1/2010	6:40:38 PM	Bypass valve opened
10/1/2010	6:40:38 PM	Helium MFC set to  100.000000
10/1/2010	6:40:38 PM	H2 MFC set to  0.000000
10/1/2010	6:40:38 PM	BCl3 MFC set to  0.000000
10/1/2010	6:40:38 PM	PHl3 MFC set to  0.000000
10/1/2010	6:40:38 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:40:38 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:40:38 PM	Tube furnace set to 0
10/1/2010	6:41:38 PM	Helium valve closed
10/1/2010	6:41:38 PM	H2 valve closed
10/1/2010	6:41:38 PM	BCl3 valve closed
10/1/2010	6:41:38 PM	PH3 valve closed
10/1/2010	6:41:38 PM	SiCl4 pre valve closed
10/1/2010	6:41:38 PM	SiCl4 post valve closed
10/1/2010	6:41:38 PM	Bubbler valve closed
10/1/2010	6:41:38 PM	Main Vac valve opened
10/1/2010	6:41:38 PM	Bypass valve opened
10/1/2010	6:41:38 PM	Helium MFC set to  0.000000
10/1/2010	6:41:38 PM	H2 MFC set to  0.000000
10/1/2010	6:41:38 PM	BCl3 MFC set to  0.000000
10/1/2010	6:41:38 PM	PHl3 MFC set to  0.000000
10/1/2010	6:41:38 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:41:38 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:41:38 PM	Tube furnace set to 0
10/1/2010	6:42:38 PM	H2 valve closed
10/1/2010	6:42:38 PM	BCl3 valve closed
10/1/2010	6:42:38 PM	PH3 valve closed
10/1/2010	6:42:38 PM	SiCl4 pre valve closed
10/1/2010	6:42:38 PM	SiCl4 post valve closed
10/1/2010	6:42:38 PM	Bubbler valve closed
10/1/2010	6:42:38 PM	Helium valve opened
10/1/2010	6:42:38 PM	Main Vac valve opened
10/1/2010	6:42:38 PM	Bypass valve opened
10/1/2010	6:42:38 PM	Helium MFC set to  100.000000
10/1/2010	6:42:38 PM	H2 MFC set to  0.000000
10/1/2010	6:42:38 PM	BCl3 MFC set to  0.000000
10/1/2010	6:42:38 PM	PHl3 MFC set to  0.000000
10/1/2010	6:42:38 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:42:38 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:42:39 PM	Tube furnace set to 0
10/1/2010	6:43:39 PM	Helium valve closed
10/1/2010	6:43:39 PM	H2 valve closed
10/1/2010	6:43:39 PM	BCl3 valve closed
10/1/2010	6:43:39 PM	PH3 valve closed
10/1/2010	6:43:39 PM	SiCl4 pre valve closed
10/1/2010	6:43:39 PM	SiCl4 post valve closed
10/1/2010	6:43:39 PM	Bubbler valve closed
10/1/2010	6:43:39 PM	Main Vac valve opened
10/1/2010	6:43:39 PM	Bypass valve opened
10/1/2010	6:43:39 PM	Helium MFC set to  0.000000
10/1/2010	6:43:39 PM	H2 MFC set to  0.000000
10/1/2010	6:43:39 PM	BCl3 MFC set to  0.000000
10/1/2010	6:43:39 PM	PHl3 MFC set to  0.000000
10/1/2010	6:43:39 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:43:39 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:43:39 PM	Tube furnace set to 0
10/1/2010	6:44:39 PM	H2 valve closed
10/1/2010	6:44:39 PM	BCl3 valve closed
10/1/2010	6:44:39 PM	PH3 valve closed
10/1/2010	6:44:39 PM	SiCl4 pre valve closed
10/1/2010	6:44:39 PM	SiCl4 post valve closed
10/1/2010	6:44:39 PM	Bubbler valve closed
10/1/2010	6:44:39 PM	Helium valve opened
10/1/2010	6:44:39 PM	Main Vac valve opened
10/1/2010	6:44:39 PM	Bypass valve opened
10/1/2010	6:44:39 PM	Helium MFC set to  100.000000
10/1/2010	6:44:39 PM	H2 MFC set to  0.000000
10/1/2010	6:44:39 PM	BCl3 MFC set to  0.000000
10/1/2010	6:44:39 PM	PHl3 MFC set to  0.000000
10/1/2010	6:44:39 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:44:39 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:44:39 PM	Tube furnace set to 0
10/1/2010	6:45:39 PM	Helium valve closed
10/1/2010	6:45:39 PM	H2 valve closed
10/1/2010	6:45:39 PM	BCl3 valve closed
10/1/2010	6:45:39 PM	PH3 valve closed
10/1/2010	6:45:39 PM	SiCl4 pre valve closed
10/1/2010	6:45:39 PM	SiCl4 post valve closed
10/1/2010	6:45:39 PM	Bubbler valve closed
10/1/2010	6:45:39 PM	Main Vac valve opened
10/1/2010	6:45:39 PM	Bypass valve opened
10/1/2010	6:45:39 PM	Helium MFC set to  0.000000
10/1/2010	6:45:39 PM	H2 MFC set to  0.000000
10/1/2010	6:45:39 PM	BCl3 MFC set to  0.000000
10/1/2010	6:45:39 PM	PHl3 MFC set to  0.000000
10/1/2010	6:45:39 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:45:39 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:45:39 PM	Tube furnace set to 0
10/1/2010	6:46:39 PM	H2 valve closed
10/1/2010	6:46:39 PM	BCl3 valve closed
10/1/2010	6:46:39 PM	PH3 valve closed
10/1/2010	6:46:39 PM	SiCl4 pre valve closed
10/1/2010	6:46:39 PM	SiCl4 post valve closed
10/1/2010	6:46:39 PM	Bubbler valve closed
10/1/2010	6:46:39 PM	Helium valve opened
10/1/2010	6:46:39 PM	Main Vac valve opened
10/1/2010	6:46:39 PM	Bypass valve opened
10/1/2010	6:46:39 PM	Helium MFC set to  100.000000
10/1/2010	6:46:39 PM	H2 MFC set to  0.000000
10/1/2010	6:46:39 PM	BCl3 MFC set to  0.000000
10/1/2010	6:46:39 PM	PHl3 MFC set to  0.000000
10/1/2010	6:46:39 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:46:39 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:46:39 PM	Tube furnace set to 0
10/1/2010	6:47:39 PM	Helium valve closed
10/1/2010	6:47:39 PM	H2 valve closed
10/1/2010	6:47:39 PM	BCl3 valve closed
10/1/2010	6:47:39 PM	PH3 valve closed
10/1/2010	6:47:39 PM	SiCl4 pre valve closed
10/1/2010	6:47:39 PM	SiCl4 post valve closed
10/1/2010	6:47:39 PM	Bubbler valve closed
10/1/2010	6:47:39 PM	Main Vac valve opened
10/1/2010	6:47:39 PM	Bypass valve opened
10/1/2010	6:47:39 PM	Helium MFC set to  0.000000
10/1/2010	6:47:39 PM	H2 MFC set to  0.000000
10/1/2010	6:47:39 PM	BCl3 MFC set to  0.000000
10/1/2010	6:47:39 PM	PHl3 MFC set to  0.000000
10/1/2010	6:47:40 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:47:40 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:47:40 PM	Tube furnace set to 0
10/1/2010	6:48:40 PM	H2 valve closed
10/1/2010	6:48:40 PM	BCl3 valve closed
10/1/2010	6:48:40 PM	PH3 valve closed
10/1/2010	6:48:40 PM	SiCl4 pre valve closed
10/1/2010	6:48:40 PM	SiCl4 post valve closed
10/1/2010	6:48:40 PM	Bubbler valve closed
10/1/2010	6:48:40 PM	Helium valve opened
10/1/2010	6:48:40 PM	Main Vac valve opened
10/1/2010	6:48:40 PM	Bypass valve opened
10/1/2010	6:48:40 PM	Helium MFC set to  100.000000
10/1/2010	6:48:40 PM	H2 MFC set to  0.000000
10/1/2010	6:48:40 PM	BCl3 MFC set to  0.000000
10/1/2010	6:48:40 PM	PHl3 MFC set to  0.000000
10/1/2010	6:48:40 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:48:40 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:48:40 PM	Tube furnace set to 0
10/1/2010	6:49:40 PM	Helium valve closed
10/1/2010	6:49:40 PM	H2 valve closed
10/1/2010	6:49:40 PM	BCl3 valve closed
10/1/2010	6:49:40 PM	PH3 valve closed
10/1/2010	6:49:40 PM	SiCl4 pre valve closed
10/1/2010	6:49:40 PM	SiCl4 post valve closed
10/1/2010	6:49:40 PM	Bubbler valve closed
10/1/2010	6:49:40 PM	Main Vac valve opened
10/1/2010	6:49:40 PM	Bypass valve opened
10/1/2010	6:49:40 PM	Helium MFC set to  0.000000
10/1/2010	6:49:40 PM	H2 MFC set to  0.000000
10/1/2010	6:49:40 PM	BCl3 MFC set to  0.000000
10/1/2010	6:49:40 PM	PHl3 MFC set to  0.000000
10/1/2010	6:49:40 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:49:40 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:49:40 PM	Tube furnace set to 0
10/1/2010	6:50:40 PM	H2 valve closed
10/1/2010	6:50:40 PM	BCl3 valve closed
10/1/2010	6:50:40 PM	PH3 valve closed
10/1/2010	6:50:40 PM	SiCl4 pre valve closed
10/1/2010	6:50:40 PM	SiCl4 post valve closed
10/1/2010	6:50:40 PM	Bubbler valve closed
10/1/2010	6:50:40 PM	Helium valve opened
10/1/2010	6:50:40 PM	Main Vac valve opened
10/1/2010	6:50:40 PM	Bypass valve opened
10/1/2010	6:50:40 PM	Helium MFC set to  100.000000
10/1/2010	6:50:40 PM	H2 MFC set to  0.000000
10/1/2010	6:50:40 PM	BCl3 MFC set to  0.000000
10/1/2010	6:50:40 PM	PHl3 MFC set to  0.000000
10/1/2010	6:50:40 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:50:40 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:50:40 PM	Tube furnace set to 0
10/1/2010	6:51:28 PM	Run aborted at 6:51 PM
10/1/2010	6:51:28 PM	Helium valve closed
10/1/2010	6:51:28 PM	H2 valve closed
10/1/2010	6:51:28 PM	BCl3 valve closed
10/1/2010	6:51:28 PM	PH3 valve closed
10/1/2010	6:51:28 PM	SiCl4 pre valve closed
10/1/2010	6:51:28 PM	SiCl4 post valve closed
10/1/2010	6:51:28 PM	Bypass valve closed
10/1/2010	6:51:28 PM	Main Vac valve closed
10/1/2010	6:51:28 PM	Bubbler valve closed
10/1/2010	6:51:28 PM	Helium MFC set to  0.000000
10/1/2010	6:51:28 PM	H2 MFC set to  0.000000
10/1/2010	6:51:28 PM	BCl3 MFC set to  0.000000
10/1/2010	6:51:28 PM	PHl3 MFC set to  0.000000
10/1/2010	6:51:28 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:51:28 PM	Tube furnace set to 0
10/1/2010	6:51:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	6:51:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	6:51:31 PM	Recipe started at 6:51 PM
10/1/2010	6:51:31 PM	Helium valve closed
10/1/2010	6:51:31 PM	H2 valve closed
10/1/2010	6:51:31 PM	BCl3 valve closed
10/1/2010	6:51:31 PM	PH3 valve closed
10/1/2010	6:51:31 PM	SiCl4 pre valve closed
10/1/2010	6:51:31 PM	SiCl4 post valve closed
10/1/2010	6:51:31 PM	Main Vac valve closed
10/1/2010	6:51:31 PM	Bubbler valve closed
10/1/2010	6:51:31 PM	Bypass valve opened
10/1/2010	6:51:31 PM	Helium MFC set to  0.000000
10/1/2010	6:51:31 PM	H2 MFC set to  0.000000
10/1/2010	6:51:31 PM	BCl3 MFC set to  0.000000
10/1/2010	6:51:31 PM	PHl3 MFC set to  0.000000
10/1/2010	6:51:31 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:51:31 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:51:31 PM	Tube furnace set to 0
10/1/2010	6:51:31 PM	Helium valve closed
10/1/2010	6:51:31 PM	H2 valve closed
10/1/2010	6:51:31 PM	BCl3 valve closed
10/1/2010	6:51:31 PM	PH3 valve closed
10/1/2010	6:51:31 PM	SiCl4 pre valve closed
10/1/2010	6:51:31 PM	SiCl4 post valve closed
10/1/2010	6:51:31 PM	Bubbler valve closed
10/1/2010	6:51:31 PM	Main Vac valve opened
10/1/2010	6:51:31 PM	Bypass valve opened
10/1/2010	6:51:31 PM	Helium MFC set to  0.000000
10/1/2010	6:51:31 PM	H2 MFC set to  0.000000
10/1/2010	6:51:31 PM	BCl3 MFC set to  0.000000
10/1/2010	6:51:31 PM	PHl3 MFC set to  0.000000
10/1/2010	6:51:31 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:51:31 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:51:31 PM	Tube furnace set to 0
10/1/2010	6:51:32 PM	Run finished at 6:51 PM
10/1/2010	6:51:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	6:52:20 PM	Recipe started at 6:52 PM
10/1/2010	6:52:20 PM	Helium valve closed
10/1/2010	6:52:20 PM	BCl3 valve closed
10/1/2010	6:52:20 PM	PH3 valve closed
10/1/2010	6:52:20 PM	SiCl4 pre valve closed
10/1/2010	6:52:20 PM	SiCl4 post valve closed
10/1/2010	6:52:20 PM	Main Vac valve closed
10/1/2010	6:52:20 PM	Bypass valve closed
10/1/2010	6:52:20 PM	Bubbler valve closed
10/1/2010	6:52:20 PM	H2 valve opened
10/1/2010	6:52:20 PM	Helium MFC set to  0.000000
10/1/2010	6:52:20 PM	H2 MFC set to  500.000000
10/1/2010	6:52:20 PM	BCl3 MFC set to  0.000000
10/1/2010	6:52:20 PM	PHl3 MFC set to  0.000000
10/1/2010	6:52:20 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:52:20 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:52:20 PM	Tube furnace set to 1000
10/1/2010	6:53:39 PM	Helium valve closed
10/1/2010	6:53:39 PM	BCl3 valve closed
10/1/2010	6:53:39 PM	PH3 valve closed
10/1/2010	6:53:39 PM	SiCl4 pre valve closed
10/1/2010	6:53:39 PM	SiCl4 post valve closed
10/1/2010	6:53:39 PM	Main Vac valve closed
10/1/2010	6:53:39 PM	Bypass valve closed
10/1/2010	6:53:39 PM	H2 valve opened
10/1/2010	6:53:39 PM	Bubbler valve opened
10/1/2010	6:53:39 PM	Helium MFC set to  0.000000
10/1/2010	6:53:39 PM	H2 MFC set to  500.000000
10/1/2010	6:53:39 PM	BCl3 MFC set to  0.000000
10/1/2010	6:53:39 PM	PHl3 MFC set to  0.000000
10/1/2010	6:53:39 PM	SiCl4 MFC set to  0.000000
10/1/2010	6:53:39 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	6:53:39 PM	Tube furnace set to 1000
10/1/2010	7:13:39 PM	Helium valve closed
10/1/2010	7:13:39 PM	PH3 valve closed
10/1/2010	7:13:39 PM	Main Vac valve closed
10/1/2010	7:13:39 PM	Bypass valve closed
10/1/2010	7:13:39 PM	H2 valve opened
10/1/2010	7:13:39 PM	BCl3 valve opened
10/1/2010	7:13:39 PM	SiCl4 pre valve opened
10/1/2010	7:13:39 PM	SiCl4 post valve opened
10/1/2010	7:13:39 PM	Bubbler valve opened
10/1/2010	7:13:39 PM	Helium MFC set to  0.000000
10/1/2010	7:13:39 PM	H2 MFC set to  500.000000
10/1/2010	7:13:39 PM	BCl3 MFC set to  12.000000
10/1/2010	7:13:39 PM	PHl3 MFC set to  0.000000
10/1/2010	7:13:39 PM	SiCl4 MFC set to  50.000000
10/1/2010	7:13:39 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	7:13:39 PM	Tube furnace set to 1000
10/1/2010	7:26:59 PM	Helium valve closed
10/1/2010	7:26:59 PM	BCl3 valve closed
10/1/2010	7:26:59 PM	PH3 valve closed
10/1/2010	7:26:59 PM	SiCl4 pre valve closed
10/1/2010	7:26:59 PM	SiCl4 post valve closed
10/1/2010	7:26:59 PM	Main Vac valve closed
10/1/2010	7:26:59 PM	Bypass valve closed
10/1/2010	7:26:59 PM	H2 valve opened
10/1/2010	7:26:59 PM	Bubbler valve opened
10/1/2010	7:26:59 PM	Helium MFC set to  0.000000
10/1/2010	7:26:59 PM	H2 MFC set to  500.000000
10/1/2010	7:26:59 PM	BCl3 MFC set to  0.000000
10/1/2010	7:26:59 PM	PHl3 MFC set to  0.000000
10/1/2010	7:26:59 PM	SiCl4 MFC set to  0.000000
10/1/2010	7:26:59 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	7:27:00 PM	Tube furnace set to 750
10/1/2010	7:47:00 PM	H2 valve closed
10/1/2010	7:47:00 PM	BCl3 valve closed
10/1/2010	7:47:00 PM	PH3 valve closed
10/1/2010	7:47:00 PM	SiCl4 pre valve closed
10/1/2010	7:47:00 PM	SiCl4 post valve closed
10/1/2010	7:47:00 PM	Main Vac valve closed
10/1/2010	7:47:00 PM	Bypass valve closed
10/1/2010	7:47:00 PM	Helium valve opened
10/1/2010	7:47:00 PM	Bubbler valve opened
10/1/2010	7:47:00 PM	Helium MFC set to  500.000000
10/1/2010	7:47:00 PM	H2 MFC set to  0.000000
10/1/2010	7:47:00 PM	BCl3 MFC set to  0.000000
10/1/2010	7:47:00 PM	PHl3 MFC set to  0.000000
10/1/2010	7:47:00 PM	SiCl4 MFC set to  0.000000
10/1/2010	7:47:00 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	7:47:00 PM	Tube furnace set to 0
10/1/2010	7:56:28 PM	Run aborted at 7:56 PM
10/1/2010	7:56:28 PM	Helium valve closed
10/1/2010	7:56:28 PM	H2 valve closed
10/1/2010	7:56:28 PM	BCl3 valve closed
10/1/2010	7:56:28 PM	PH3 valve closed
10/1/2010	7:56:28 PM	SiCl4 pre valve closed
10/1/2010	7:56:28 PM	SiCl4 post valve closed
10/1/2010	7:56:28 PM	Bypass valve closed
10/1/2010	7:56:28 PM	Main Vac valve closed
10/1/2010	7:56:28 PM	Bubbler valve closed
10/1/2010	7:56:28 PM	Helium MFC set to  0.000000
10/1/2010	7:56:28 PM	H2 MFC set to  0.000000
10/1/2010	7:56:28 PM	BCl3 MFC set to  0.000000
10/1/2010	7:56:28 PM	PHl3 MFC set to  0.000000
10/1/2010	7:56:28 PM	SiCl4 MFC set to  0.000000
10/1/2010	7:56:28 PM	Tube furnace set to 0
10/1/2010	7:56:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2010	7:56:30 PM	Recipe started at 7:56 PM
10/1/2010	7:56:30 PM	H2 valve closed
10/1/2010	7:56:30 PM	BCl3 valve closed
10/1/2010	7:56:30 PM	PH3 valve closed
10/1/2010	7:56:30 PM	SiCl4 pre valve closed
10/1/2010	7:56:30 PM	SiCl4 post valve closed
10/1/2010	7:56:30 PM	Main Vac valve closed
10/1/2010	7:56:30 PM	Bypass valve closed
10/1/2010	7:56:30 PM	Bubbler valve closed
10/1/2010	7:56:30 PM	Helium valve opened
10/1/2010	7:56:30 PM	Helium MFC set to  500.000000
10/1/2010	7:56:30 PM	H2 MFC set to  0.000000
10/1/2010	7:56:30 PM	BCl3 MFC set to  0.000000
10/1/2010	7:56:30 PM	PHl3 MFC set to  0.000000
10/1/2010	7:56:30 PM	SiCl4 MFC set to  0.000000
10/1/2010	7:56:30 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	7:56:30 PM	Tube furnace set to 0
10/1/2010	7:56:31 PM	Helium valve closed
10/1/2010	7:56:31 PM	H2 valve closed
10/1/2010	7:56:31 PM	BCl3 valve closed
10/1/2010	7:56:31 PM	PH3 valve closed
10/1/2010	7:56:31 PM	SiCl4 pre valve closed
10/1/2010	7:56:31 PM	SiCl4 post valve closed
10/1/2010	7:56:31 PM	Main Vac valve closed
10/1/2010	7:56:31 PM	Bypass valve closed
10/1/2010	7:56:31 PM	Bubbler valve closed
10/1/2010	7:56:31 PM	Helium MFC set to  0.000000
10/1/2010	7:56:31 PM	H2 MFC set to  0.000000
10/1/2010	7:56:31 PM	BCl3 MFC set to  0.000000
10/1/2010	7:56:31 PM	PHl3 MFC set to  0.000000
10/1/2010	7:56:31 PM	SiCl4 MFC set to  0.000000
10/1/2010	7:56:31 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	7:56:31 PM	Tube furnace set to 0
10/1/2010	7:56:31 PM	Run finished at 7:56 PM
10/1/2010	7:56:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2010	8:06:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	8:06:50 PM	Recipe started at 8:06 PM
10/1/2010	8:06:51 PM	Helium valve closed
10/1/2010	8:06:51 PM	H2 valve closed
10/1/2010	8:06:51 PM	BCl3 valve closed
10/1/2010	8:06:51 PM	PH3 valve closed
10/1/2010	8:06:51 PM	SiCl4 pre valve closed
10/1/2010	8:06:51 PM	SiCl4 post valve closed
10/1/2010	8:06:51 PM	Main Vac valve closed
10/1/2010	8:06:51 PM	Bubbler valve closed
10/1/2010	8:06:51 PM	Bypass valve opened
10/1/2010	8:06:51 PM	Helium MFC set to  0.000000
10/1/2010	8:06:51 PM	H2 MFC set to  0.000000
10/1/2010	8:06:51 PM	BCl3 MFC set to  0.000000
10/1/2010	8:06:51 PM	PHl3 MFC set to  0.000000
10/1/2010	8:06:51 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:06:51 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:06:51 PM	Tube furnace set to 0
10/1/2010	8:07:33 PM	Helium valve closed
10/1/2010	8:07:33 PM	H2 valve closed
10/1/2010	8:07:33 PM	BCl3 valve closed
10/1/2010	8:07:33 PM	PH3 valve closed
10/1/2010	8:07:33 PM	SiCl4 pre valve closed
10/1/2010	8:07:33 PM	SiCl4 post valve closed
10/1/2010	8:07:33 PM	Bubbler valve closed
10/1/2010	8:07:33 PM	Main Vac valve opened
10/1/2010	8:07:33 PM	Bypass valve opened
10/1/2010	8:07:33 PM	Helium MFC set to  0.000000
10/1/2010	8:07:33 PM	H2 MFC set to  0.000000
10/1/2010	8:07:33 PM	BCl3 MFC set to  0.000000
10/1/2010	8:07:33 PM	PHl3 MFC set to  0.000000
10/1/2010	8:07:33 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:07:33 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:07:33 PM	Tube furnace set to 0
10/1/2010	8:07:33 PM	Run finished at 8:07 PM
10/1/2010	8:07:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	8:07:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	8:07:59 PM	Recipe started at 8:07 PM
10/1/2010	8:07:59 PM	Helium valve closed
10/1/2010	8:07:59 PM	H2 valve closed
10/1/2010	8:07:59 PM	BCl3 valve closed
10/1/2010	8:07:59 PM	PH3 valve closed
10/1/2010	8:07:59 PM	SiCl4 pre valve closed
10/1/2010	8:07:59 PM	SiCl4 post valve closed
10/1/2010	8:07:59 PM	Main Vac valve closed
10/1/2010	8:07:59 PM	Bubbler valve closed
10/1/2010	8:07:59 PM	Bypass valve opened
10/1/2010	8:07:59 PM	Helium MFC set to  0.000000
10/1/2010	8:07:59 PM	H2 MFC set to  0.000000
10/1/2010	8:07:59 PM	BCl3 MFC set to  0.000000
10/1/2010	8:07:59 PM	PHl3 MFC set to  0.000000
10/1/2010	8:07:59 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:07:59 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:08:00 PM	Tube furnace set to 0
10/1/2010	8:08:00 PM	Helium valve closed
10/1/2010	8:08:00 PM	H2 valve closed
10/1/2010	8:08:00 PM	BCl3 valve closed
10/1/2010	8:08:00 PM	PH3 valve closed
10/1/2010	8:08:00 PM	SiCl4 pre valve closed
10/1/2010	8:08:00 PM	SiCl4 post valve closed
10/1/2010	8:08:00 PM	Bubbler valve closed
10/1/2010	8:08:00 PM	Main Vac valve opened
10/1/2010	8:08:00 PM	Bypass valve opened
10/1/2010	8:08:00 PM	Helium MFC set to  0.000000
10/1/2010	8:08:00 PM	H2 MFC set to  0.000000
10/1/2010	8:08:00 PM	BCl3 MFC set to  0.000000
10/1/2010	8:08:00 PM	PHl3 MFC set to  0.000000
10/1/2010	8:08:00 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:08:00 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:08:00 PM	Tube furnace set to 0
10/1/2010	8:09:00 PM	H2 valve closed
10/1/2010	8:09:00 PM	BCl3 valve closed
10/1/2010	8:09:00 PM	PH3 valve closed
10/1/2010	8:09:00 PM	SiCl4 pre valve closed
10/1/2010	8:09:00 PM	SiCl4 post valve closed
10/1/2010	8:09:00 PM	Bubbler valve closed
10/1/2010	8:09:00 PM	Helium valve opened
10/1/2010	8:09:00 PM	Main Vac valve opened
10/1/2010	8:09:00 PM	Bypass valve opened
10/1/2010	8:09:00 PM	Helium MFC set to  100.000000
10/1/2010	8:09:00 PM	H2 MFC set to  0.000000
10/1/2010	8:09:00 PM	BCl3 MFC set to  0.000000
10/1/2010	8:09:00 PM	PHl3 MFC set to  0.000000
10/1/2010	8:09:00 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:09:00 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:09:00 PM	Tube furnace set to 0
10/1/2010	8:10:00 PM	Helium valve closed
10/1/2010	8:10:00 PM	H2 valve closed
10/1/2010	8:10:00 PM	BCl3 valve closed
10/1/2010	8:10:00 PM	PH3 valve closed
10/1/2010	8:10:00 PM	SiCl4 pre valve closed
10/1/2010	8:10:00 PM	SiCl4 post valve closed
10/1/2010	8:10:00 PM	Bubbler valve closed
10/1/2010	8:10:00 PM	Main Vac valve opened
10/1/2010	8:10:00 PM	Bypass valve opened
10/1/2010	8:10:00 PM	Helium MFC set to  0.000000
10/1/2010	8:10:00 PM	H2 MFC set to  0.000000
10/1/2010	8:10:00 PM	BCl3 MFC set to  0.000000
10/1/2010	8:10:00 PM	PHl3 MFC set to  0.000000
10/1/2010	8:10:00 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:10:00 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:10:01 PM	Tube furnace set to 0
10/1/2010	8:11:01 PM	H2 valve closed
10/1/2010	8:11:01 PM	BCl3 valve closed
10/1/2010	8:11:01 PM	PH3 valve closed
10/1/2010	8:11:01 PM	SiCl4 pre valve closed
10/1/2010	8:11:01 PM	SiCl4 post valve closed
10/1/2010	8:11:01 PM	Bubbler valve closed
10/1/2010	8:11:01 PM	Helium valve opened
10/1/2010	8:11:01 PM	Main Vac valve opened
10/1/2010	8:11:01 PM	Bypass valve opened
10/1/2010	8:11:01 PM	Helium MFC set to  100.000000
10/1/2010	8:11:01 PM	H2 MFC set to  0.000000
10/1/2010	8:11:01 PM	BCl3 MFC set to  0.000000
10/1/2010	8:11:01 PM	PHl3 MFC set to  0.000000
10/1/2010	8:11:01 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:11:01 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:11:01 PM	Tube furnace set to 0
10/1/2010	8:12:01 PM	Helium valve closed
10/1/2010	8:12:01 PM	H2 valve closed
10/1/2010	8:12:01 PM	BCl3 valve closed
10/1/2010	8:12:01 PM	PH3 valve closed
10/1/2010	8:12:01 PM	SiCl4 pre valve closed
10/1/2010	8:12:01 PM	SiCl4 post valve closed
10/1/2010	8:12:01 PM	Bubbler valve closed
10/1/2010	8:12:01 PM	Main Vac valve opened
10/1/2010	8:12:01 PM	Bypass valve opened
10/1/2010	8:12:01 PM	Helium MFC set to  0.000000
10/1/2010	8:12:01 PM	H2 MFC set to  0.000000
10/1/2010	8:12:01 PM	BCl3 MFC set to  0.000000
10/1/2010	8:12:01 PM	PHl3 MFC set to  0.000000
10/1/2010	8:12:01 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:12:01 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:12:01 PM	Tube furnace set to 0
10/1/2010	8:13:01 PM	H2 valve closed
10/1/2010	8:13:01 PM	BCl3 valve closed
10/1/2010	8:13:01 PM	PH3 valve closed
10/1/2010	8:13:01 PM	SiCl4 pre valve closed
10/1/2010	8:13:01 PM	SiCl4 post valve closed
10/1/2010	8:13:01 PM	Bubbler valve closed
10/1/2010	8:13:01 PM	Helium valve opened
10/1/2010	8:13:01 PM	Main Vac valve opened
10/1/2010	8:13:01 PM	Bypass valve opened
10/1/2010	8:13:01 PM	Helium MFC set to  100.000000
10/1/2010	8:13:01 PM	H2 MFC set to  0.000000
10/1/2010	8:13:01 PM	BCl3 MFC set to  0.000000
10/1/2010	8:13:01 PM	PHl3 MFC set to  0.000000
10/1/2010	8:13:01 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:13:01 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:13:01 PM	Tube furnace set to 0
10/1/2010	8:14:01 PM	Helium valve closed
10/1/2010	8:14:01 PM	H2 valve closed
10/1/2010	8:14:01 PM	BCl3 valve closed
10/1/2010	8:14:01 PM	PH3 valve closed
10/1/2010	8:14:01 PM	SiCl4 pre valve closed
10/1/2010	8:14:01 PM	SiCl4 post valve closed
10/1/2010	8:14:01 PM	Bubbler valve closed
10/1/2010	8:14:01 PM	Main Vac valve opened
10/1/2010	8:14:01 PM	Bypass valve opened
10/1/2010	8:14:01 PM	Helium MFC set to  0.000000
10/1/2010	8:14:01 PM	H2 MFC set to  0.000000
10/1/2010	8:14:01 PM	BCl3 MFC set to  0.000000
10/1/2010	8:14:01 PM	PHl3 MFC set to  0.000000
10/1/2010	8:14:01 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:14:01 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:14:01 PM	Tube furnace set to 0
10/1/2010	8:15:01 PM	H2 valve closed
10/1/2010	8:15:01 PM	BCl3 valve closed
10/1/2010	8:15:01 PM	PH3 valve closed
10/1/2010	8:15:01 PM	SiCl4 pre valve closed
10/1/2010	8:15:01 PM	SiCl4 post valve closed
10/1/2010	8:15:01 PM	Bubbler valve closed
10/1/2010	8:15:01 PM	Helium valve opened
10/1/2010	8:15:01 PM	Main Vac valve opened
10/1/2010	8:15:01 PM	Bypass valve opened
10/1/2010	8:15:01 PM	Helium MFC set to  100.000000
10/1/2010	8:15:01 PM	H2 MFC set to  0.000000
10/1/2010	8:15:01 PM	BCl3 MFC set to  0.000000
10/1/2010	8:15:01 PM	PHl3 MFC set to  0.000000
10/1/2010	8:15:01 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:15:01 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:15:02 PM	Tube furnace set to 0
10/1/2010	8:16:02 PM	Helium valve closed
10/1/2010	8:16:02 PM	H2 valve closed
10/1/2010	8:16:02 PM	BCl3 valve closed
10/1/2010	8:16:02 PM	PH3 valve closed
10/1/2010	8:16:02 PM	SiCl4 pre valve closed
10/1/2010	8:16:02 PM	SiCl4 post valve closed
10/1/2010	8:16:02 PM	Bubbler valve closed
10/1/2010	8:16:02 PM	Main Vac valve opened
10/1/2010	8:16:02 PM	Bypass valve opened
10/1/2010	8:16:02 PM	Helium MFC set to  0.000000
10/1/2010	8:16:02 PM	H2 MFC set to  0.000000
10/1/2010	8:16:02 PM	BCl3 MFC set to  0.000000
10/1/2010	8:16:02 PM	PHl3 MFC set to  0.000000
10/1/2010	8:16:02 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:16:02 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:16:02 PM	Tube furnace set to 0
10/1/2010	8:17:02 PM	H2 valve closed
10/1/2010	8:17:02 PM	BCl3 valve closed
10/1/2010	8:17:02 PM	PH3 valve closed
10/1/2010	8:17:02 PM	SiCl4 pre valve closed
10/1/2010	8:17:02 PM	SiCl4 post valve closed
10/1/2010	8:17:02 PM	Bubbler valve closed
10/1/2010	8:17:02 PM	Helium valve opened
10/1/2010	8:17:02 PM	Main Vac valve opened
10/1/2010	8:17:02 PM	Bypass valve opened
10/1/2010	8:17:02 PM	Helium MFC set to  100.000000
10/1/2010	8:17:02 PM	H2 MFC set to  0.000000
10/1/2010	8:17:02 PM	BCl3 MFC set to  0.000000
10/1/2010	8:17:02 PM	PHl3 MFC set to  0.000000
10/1/2010	8:17:02 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:17:02 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:17:02 PM	Tube furnace set to 0
10/1/2010	8:18:02 PM	Helium valve closed
10/1/2010	8:18:02 PM	H2 valve closed
10/1/2010	8:18:02 PM	BCl3 valve closed
10/1/2010	8:18:02 PM	PH3 valve closed
10/1/2010	8:18:02 PM	SiCl4 pre valve closed
10/1/2010	8:18:02 PM	SiCl4 post valve closed
10/1/2010	8:18:02 PM	Bubbler valve closed
10/1/2010	8:18:02 PM	Main Vac valve opened
10/1/2010	8:18:02 PM	Bypass valve opened
10/1/2010	8:18:02 PM	Helium MFC set to  0.000000
10/1/2010	8:18:02 PM	H2 MFC set to  0.000000
10/1/2010	8:18:02 PM	BCl3 MFC set to  0.000000
10/1/2010	8:18:02 PM	PHl3 MFC set to  0.000000
10/1/2010	8:18:02 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:18:02 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:18:02 PM	Tube furnace set to 0
10/1/2010	8:19:02 PM	H2 valve closed
10/1/2010	8:19:02 PM	BCl3 valve closed
10/1/2010	8:19:02 PM	PH3 valve closed
10/1/2010	8:19:02 PM	SiCl4 pre valve closed
10/1/2010	8:19:02 PM	SiCl4 post valve closed
10/1/2010	8:19:02 PM	Bubbler valve closed
10/1/2010	8:19:02 PM	Helium valve opened
10/1/2010	8:19:02 PM	Main Vac valve opened
10/1/2010	8:19:02 PM	Bypass valve opened
10/1/2010	8:19:02 PM	Helium MFC set to  100.000000
10/1/2010	8:19:02 PM	H2 MFC set to  0.000000
10/1/2010	8:19:02 PM	BCl3 MFC set to  0.000000
10/1/2010	8:19:02 PM	PHl3 MFC set to  0.000000
10/1/2010	8:19:02 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:19:02 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:19:02 PM	Tube furnace set to 0
10/1/2010	8:20:02 PM	Helium valve closed
10/1/2010	8:20:02 PM	H2 valve closed
10/1/2010	8:20:02 PM	BCl3 valve closed
10/1/2010	8:20:02 PM	PH3 valve closed
10/1/2010	8:20:02 PM	SiCl4 pre valve closed
10/1/2010	8:20:02 PM	SiCl4 post valve closed
10/1/2010	8:20:02 PM	Bubbler valve closed
10/1/2010	8:20:02 PM	Main Vac valve opened
10/1/2010	8:20:02 PM	Bypass valve opened
10/1/2010	8:20:02 PM	Helium MFC set to  0.000000
10/1/2010	8:20:02 PM	H2 MFC set to  0.000000
10/1/2010	8:20:02 PM	BCl3 MFC set to  0.000000
10/1/2010	8:20:02 PM	PHl3 MFC set to  0.000000
10/1/2010	8:20:02 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:20:02 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:20:03 PM	Tube furnace set to 0
10/1/2010	8:21:03 PM	H2 valve closed
10/1/2010	8:21:03 PM	BCl3 valve closed
10/1/2010	8:21:03 PM	PH3 valve closed
10/1/2010	8:21:03 PM	SiCl4 pre valve closed
10/1/2010	8:21:03 PM	SiCl4 post valve closed
10/1/2010	8:21:03 PM	Bubbler valve closed
10/1/2010	8:21:03 PM	Helium valve opened
10/1/2010	8:21:03 PM	Main Vac valve opened
10/1/2010	8:21:03 PM	Bypass valve opened
10/1/2010	8:21:03 PM	Helium MFC set to  100.000000
10/1/2010	8:21:03 PM	H2 MFC set to  0.000000
10/1/2010	8:21:03 PM	BCl3 MFC set to  0.000000
10/1/2010	8:21:03 PM	PHl3 MFC set to  0.000000
10/1/2010	8:21:03 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:21:03 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:21:03 PM	Tube furnace set to 0
10/1/2010	8:22:03 PM	Helium valve closed
10/1/2010	8:22:03 PM	H2 valve closed
10/1/2010	8:22:03 PM	BCl3 valve closed
10/1/2010	8:22:03 PM	PH3 valve closed
10/1/2010	8:22:03 PM	SiCl4 pre valve closed
10/1/2010	8:22:03 PM	SiCl4 post valve closed
10/1/2010	8:22:03 PM	Bubbler valve closed
10/1/2010	8:22:03 PM	Main Vac valve opened
10/1/2010	8:22:03 PM	Bypass valve opened
10/1/2010	8:22:03 PM	Helium MFC set to  0.000000
10/1/2010	8:22:03 PM	H2 MFC set to  0.000000
10/1/2010	8:22:03 PM	BCl3 MFC set to  0.000000
10/1/2010	8:22:03 PM	PHl3 MFC set to  0.000000
10/1/2010	8:22:03 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:22:03 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:22:03 PM	Tube furnace set to 0
10/1/2010	8:23:03 PM	H2 valve closed
10/1/2010	8:23:03 PM	BCl3 valve closed
10/1/2010	8:23:03 PM	PH3 valve closed
10/1/2010	8:23:03 PM	SiCl4 pre valve closed
10/1/2010	8:23:03 PM	SiCl4 post valve closed
10/1/2010	8:23:03 PM	Bubbler valve closed
10/1/2010	8:23:03 PM	Helium valve opened
10/1/2010	8:23:03 PM	Main Vac valve opened
10/1/2010	8:23:03 PM	Bypass valve opened
10/1/2010	8:23:03 PM	Helium MFC set to  100.000000
10/1/2010	8:23:03 PM	H2 MFC set to  0.000000
10/1/2010	8:23:03 PM	BCl3 MFC set to  0.000000
10/1/2010	8:23:03 PM	PHl3 MFC set to  0.000000
10/1/2010	8:23:03 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:23:03 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:23:03 PM	Tube furnace set to 0
10/1/2010	8:24:03 PM	Helium valve closed
10/1/2010	8:24:03 PM	H2 valve closed
10/1/2010	8:24:03 PM	BCl3 valve closed
10/1/2010	8:24:03 PM	PH3 valve closed
10/1/2010	8:24:03 PM	SiCl4 pre valve closed
10/1/2010	8:24:03 PM	SiCl4 post valve closed
10/1/2010	8:24:03 PM	Bubbler valve closed
10/1/2010	8:24:03 PM	Main Vac valve opened
10/1/2010	8:24:03 PM	Bypass valve opened
10/1/2010	8:24:03 PM	Helium MFC set to  0.000000
10/1/2010	8:24:03 PM	H2 MFC set to  0.000000
10/1/2010	8:24:03 PM	BCl3 MFC set to  0.000000
10/1/2010	8:24:03 PM	PHl3 MFC set to  0.000000
10/1/2010	8:24:03 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:24:03 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:24:03 PM	Tube furnace set to 0
10/1/2010	8:25:03 PM	H2 valve closed
10/1/2010	8:25:03 PM	BCl3 valve closed
10/1/2010	8:25:03 PM	PH3 valve closed
10/1/2010	8:25:03 PM	SiCl4 pre valve closed
10/1/2010	8:25:03 PM	SiCl4 post valve closed
10/1/2010	8:25:03 PM	Bubbler valve closed
10/1/2010	8:25:03 PM	Helium valve opened
10/1/2010	8:25:03 PM	Main Vac valve opened
10/1/2010	8:25:03 PM	Bypass valve opened
10/1/2010	8:25:03 PM	Helium MFC set to  100.000000
10/1/2010	8:25:03 PM	H2 MFC set to  0.000000
10/1/2010	8:25:03 PM	BCl3 MFC set to  0.000000
10/1/2010	8:25:03 PM	PHl3 MFC set to  0.000000
10/1/2010	8:25:03 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:25:03 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:25:04 PM	Tube furnace set to 0
10/1/2010	8:26:04 PM	Helium valve closed
10/1/2010	8:26:04 PM	H2 valve closed
10/1/2010	8:26:04 PM	BCl3 valve closed
10/1/2010	8:26:04 PM	PH3 valve closed
10/1/2010	8:26:04 PM	SiCl4 pre valve closed
10/1/2010	8:26:04 PM	SiCl4 post valve closed
10/1/2010	8:26:04 PM	Bubbler valve closed
10/1/2010	8:26:04 PM	Main Vac valve opened
10/1/2010	8:26:04 PM	Bypass valve opened
10/1/2010	8:26:04 PM	Helium MFC set to  0.000000
10/1/2010	8:26:04 PM	H2 MFC set to  0.000000
10/1/2010	8:26:04 PM	BCl3 MFC set to  0.000000
10/1/2010	8:26:04 PM	PHl3 MFC set to  0.000000
10/1/2010	8:26:04 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:26:04 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:26:04 PM	Tube furnace set to 0
10/1/2010	8:27:04 PM	H2 valve closed
10/1/2010	8:27:04 PM	BCl3 valve closed
10/1/2010	8:27:04 PM	PH3 valve closed
10/1/2010	8:27:04 PM	SiCl4 pre valve closed
10/1/2010	8:27:04 PM	SiCl4 post valve closed
10/1/2010	8:27:04 PM	Bubbler valve closed
10/1/2010	8:27:04 PM	Helium valve opened
10/1/2010	8:27:04 PM	Main Vac valve opened
10/1/2010	8:27:04 PM	Bypass valve opened
10/1/2010	8:27:04 PM	Helium MFC set to  100.000000
10/1/2010	8:27:04 PM	H2 MFC set to  0.000000
10/1/2010	8:27:04 PM	BCl3 MFC set to  0.000000
10/1/2010	8:27:04 PM	PHl3 MFC set to  0.000000
10/1/2010	8:27:04 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:27:04 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:27:04 PM	Tube furnace set to 0
10/1/2010	8:28:04 PM	Helium valve closed
10/1/2010	8:28:04 PM	H2 valve closed
10/1/2010	8:28:04 PM	BCl3 valve closed
10/1/2010	8:28:04 PM	PH3 valve closed
10/1/2010	8:28:04 PM	SiCl4 pre valve closed
10/1/2010	8:28:04 PM	SiCl4 post valve closed
10/1/2010	8:28:04 PM	Bubbler valve closed
10/1/2010	8:28:04 PM	Main Vac valve opened
10/1/2010	8:28:04 PM	Bypass valve opened
10/1/2010	8:28:04 PM	Helium MFC set to  0.000000
10/1/2010	8:28:04 PM	H2 MFC set to  0.000000
10/1/2010	8:28:04 PM	BCl3 MFC set to  0.000000
10/1/2010	8:28:04 PM	PHl3 MFC set to  0.000000
10/1/2010	8:28:04 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:28:04 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:28:04 PM	Tube furnace set to 0
10/1/2010	8:28:05 PM	Run finished at 8:28 PM
10/1/2010	8:28:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	8:43:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	8:43:30 PM	Recipe started at 8:43 PM
10/1/2010	8:43:30 PM	Helium valve closed
10/1/2010	8:43:30 PM	H2 valve closed
10/1/2010	8:43:30 PM	BCl3 valve closed
10/1/2010	8:43:30 PM	PH3 valve closed
10/1/2010	8:43:30 PM	SiCl4 pre valve closed
10/1/2010	8:43:30 PM	SiCl4 post valve closed
10/1/2010	8:43:30 PM	Main Vac valve closed
10/1/2010	8:43:30 PM	Bubbler valve closed
10/1/2010	8:43:30 PM	Bypass valve opened
10/1/2010	8:43:30 PM	Helium MFC set to  0.000000
10/1/2010	8:43:30 PM	H2 MFC set to  0.000000
10/1/2010	8:43:30 PM	BCl3 MFC set to  0.000000
10/1/2010	8:43:30 PM	PHl3 MFC set to  0.000000
10/1/2010	8:43:30 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:43:30 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:43:30 PM	Tube furnace set to 0
10/1/2010	8:43:30 PM	Helium valve closed
10/1/2010	8:43:30 PM	H2 valve closed
10/1/2010	8:43:30 PM	BCl3 valve closed
10/1/2010	8:43:30 PM	PH3 valve closed
10/1/2010	8:43:30 PM	SiCl4 pre valve closed
10/1/2010	8:43:30 PM	SiCl4 post valve closed
10/1/2010	8:43:30 PM	Bubbler valve closed
10/1/2010	8:43:30 PM	Main Vac valve opened
10/1/2010	8:43:30 PM	Bypass valve opened
10/1/2010	8:43:30 PM	Helium MFC set to  0.000000
10/1/2010	8:43:30 PM	H2 MFC set to  0.000000
10/1/2010	8:43:30 PM	BCl3 MFC set to  0.000000
10/1/2010	8:43:30 PM	PHl3 MFC set to  0.000000
10/1/2010	8:43:30 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:43:30 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:43:31 PM	Tube furnace set to 0
10/1/2010	8:43:40 PM	H2 valve closed
10/1/2010	8:43:40 PM	BCl3 valve closed
10/1/2010	8:43:40 PM	PH3 valve closed
10/1/2010	8:43:40 PM	SiCl4 pre valve closed
10/1/2010	8:43:40 PM	SiCl4 post valve closed
10/1/2010	8:43:40 PM	Bubbler valve closed
10/1/2010	8:43:40 PM	Helium valve opened
10/1/2010	8:43:40 PM	Main Vac valve opened
10/1/2010	8:43:40 PM	Bypass valve opened
10/1/2010	8:43:40 PM	Helium MFC set to  100.000000
10/1/2010	8:43:40 PM	H2 MFC set to  0.000000
10/1/2010	8:43:40 PM	BCl3 MFC set to  0.000000
10/1/2010	8:43:40 PM	PHl3 MFC set to  0.000000
10/1/2010	8:43:40 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:43:40 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:43:41 PM	Tube furnace set to 0
10/1/2010	8:44:41 PM	Helium valve closed
10/1/2010	8:44:41 PM	H2 valve closed
10/1/2010	8:44:41 PM	BCl3 valve closed
10/1/2010	8:44:41 PM	PH3 valve closed
10/1/2010	8:44:41 PM	SiCl4 pre valve closed
10/1/2010	8:44:41 PM	SiCl4 post valve closed
10/1/2010	8:44:41 PM	Bubbler valve closed
10/1/2010	8:44:41 PM	Main Vac valve opened
10/1/2010	8:44:41 PM	Bypass valve opened
10/1/2010	8:44:41 PM	Helium MFC set to  0.000000
10/1/2010	8:44:41 PM	H2 MFC set to  0.000000
10/1/2010	8:44:41 PM	BCl3 MFC set to  0.000000
10/1/2010	8:44:41 PM	PHl3 MFC set to  0.000000
10/1/2010	8:44:41 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:44:41 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:44:41 PM	Tube furnace set to 0
10/1/2010	8:45:41 PM	H2 valve closed
10/1/2010	8:45:41 PM	BCl3 valve closed
10/1/2010	8:45:41 PM	PH3 valve closed
10/1/2010	8:45:41 PM	SiCl4 pre valve closed
10/1/2010	8:45:41 PM	SiCl4 post valve closed
10/1/2010	8:45:41 PM	Bubbler valve closed
10/1/2010	8:45:41 PM	Helium valve opened
10/1/2010	8:45:41 PM	Main Vac valve opened
10/1/2010	8:45:41 PM	Bypass valve opened
10/1/2010	8:45:41 PM	Helium MFC set to  100.000000
10/1/2010	8:45:41 PM	H2 MFC set to  0.000000
10/1/2010	8:45:41 PM	BCl3 MFC set to  0.000000
10/1/2010	8:45:41 PM	PHl3 MFC set to  0.000000
10/1/2010	8:45:41 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:45:41 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:45:41 PM	Tube furnace set to 0
10/1/2010	8:46:41 PM	Helium valve closed
10/1/2010	8:46:41 PM	H2 valve closed
10/1/2010	8:46:41 PM	BCl3 valve closed
10/1/2010	8:46:41 PM	PH3 valve closed
10/1/2010	8:46:41 PM	SiCl4 pre valve closed
10/1/2010	8:46:41 PM	SiCl4 post valve closed
10/1/2010	8:46:41 PM	Bubbler valve closed
10/1/2010	8:46:41 PM	Main Vac valve opened
10/1/2010	8:46:41 PM	Bypass valve opened
10/1/2010	8:46:41 PM	Helium MFC set to  0.000000
10/1/2010	8:46:41 PM	H2 MFC set to  0.000000
10/1/2010	8:46:41 PM	BCl3 MFC set to  0.000000
10/1/2010	8:46:41 PM	PHl3 MFC set to  0.000000
10/1/2010	8:46:41 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:46:41 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:46:41 PM	Tube furnace set to 0
10/1/2010	8:47:41 PM	H2 valve closed
10/1/2010	8:47:41 PM	BCl3 valve closed
10/1/2010	8:47:41 PM	PH3 valve closed
10/1/2010	8:47:41 PM	SiCl4 pre valve closed
10/1/2010	8:47:41 PM	SiCl4 post valve closed
10/1/2010	8:47:41 PM	Bubbler valve closed
10/1/2010	8:47:41 PM	Helium valve opened
10/1/2010	8:47:41 PM	Main Vac valve opened
10/1/2010	8:47:41 PM	Bypass valve opened
10/1/2010	8:47:41 PM	Helium MFC set to  100.000000
10/1/2010	8:47:41 PM	H2 MFC set to  0.000000
10/1/2010	8:47:41 PM	BCl3 MFC set to  0.000000
10/1/2010	8:47:41 PM	PHl3 MFC set to  0.000000
10/1/2010	8:47:41 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:47:41 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:47:41 PM	Tube furnace set to 0
10/1/2010	8:48:41 PM	Helium valve closed
10/1/2010	8:48:41 PM	H2 valve closed
10/1/2010	8:48:41 PM	BCl3 valve closed
10/1/2010	8:48:41 PM	PH3 valve closed
10/1/2010	8:48:41 PM	SiCl4 pre valve closed
10/1/2010	8:48:41 PM	SiCl4 post valve closed
10/1/2010	8:48:41 PM	Bubbler valve closed
10/1/2010	8:48:41 PM	Main Vac valve opened
10/1/2010	8:48:41 PM	Bypass valve opened
10/1/2010	8:48:41 PM	Helium MFC set to  0.000000
10/1/2010	8:48:41 PM	H2 MFC set to  0.000000
10/1/2010	8:48:41 PM	BCl3 MFC set to  0.000000
10/1/2010	8:48:41 PM	PHl3 MFC set to  0.000000
10/1/2010	8:48:41 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:48:41 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:48:42 PM	Tube furnace set to 0
10/1/2010	8:48:58 PM	Run aborted at 8:48 PM
10/1/2010	8:48:58 PM	Helium valve closed
10/1/2010	8:48:58 PM	H2 valve closed
10/1/2010	8:48:58 PM	BCl3 valve closed
10/1/2010	8:48:58 PM	PH3 valve closed
10/1/2010	8:48:58 PM	SiCl4 pre valve closed
10/1/2010	8:48:58 PM	SiCl4 post valve closed
10/1/2010	8:48:58 PM	Bypass valve closed
10/1/2010	8:48:58 PM	Main Vac valve closed
10/1/2010	8:48:58 PM	Bubbler valve closed
10/1/2010	8:48:58 PM	Helium MFC set to  0.000000
10/1/2010	8:48:58 PM	H2 MFC set to  0.000000
10/1/2010	8:48:58 PM	BCl3 MFC set to  0.000000
10/1/2010	8:48:58 PM	PHl3 MFC set to  0.000000
10/1/2010	8:48:58 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:48:59 PM	Tube furnace set to 0
10/1/2010	8:48:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	8:49:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	8:49:01 PM	Recipe started at 8:49 PM
10/1/2010	8:49:01 PM	Helium valve closed
10/1/2010	8:49:01 PM	H2 valve closed
10/1/2010	8:49:01 PM	BCl3 valve closed
10/1/2010	8:49:01 PM	PH3 valve closed
10/1/2010	8:49:01 PM	SiCl4 pre valve closed
10/1/2010	8:49:01 PM	SiCl4 post valve closed
10/1/2010	8:49:01 PM	Main Vac valve closed
10/1/2010	8:49:01 PM	Bubbler valve closed
10/1/2010	8:49:01 PM	Bypass valve opened
10/1/2010	8:49:01 PM	Helium MFC set to  0.000000
10/1/2010	8:49:01 PM	H2 MFC set to  0.000000
10/1/2010	8:49:01 PM	BCl3 MFC set to  0.000000
10/1/2010	8:49:01 PM	PHl3 MFC set to  0.000000
10/1/2010	8:49:01 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:49:01 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:49:01 PM	Tube furnace set to 0
10/1/2010	8:49:01 PM	Helium valve closed
10/1/2010	8:49:01 PM	H2 valve closed
10/1/2010	8:49:01 PM	BCl3 valve closed
10/1/2010	8:49:01 PM	PH3 valve closed
10/1/2010	8:49:01 PM	SiCl4 pre valve closed
10/1/2010	8:49:01 PM	SiCl4 post valve closed
10/1/2010	8:49:01 PM	Bubbler valve closed
10/1/2010	8:49:01 PM	Main Vac valve opened
10/1/2010	8:49:01 PM	Bypass valve opened
10/1/2010	8:49:01 PM	Helium MFC set to  0.000000
10/1/2010	8:49:01 PM	H2 MFC set to  0.000000
10/1/2010	8:49:01 PM	BCl3 MFC set to  0.000000
10/1/2010	8:49:01 PM	PHl3 MFC set to  0.000000
10/1/2010	8:49:01 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:49:01 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:49:01 PM	Tube furnace set to 0
10/1/2010	8:49:01 PM	Run finished at 8:49 PM
10/1/2010	8:49:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	8:49:34 PM	Helium MFC set to  100.000000
10/1/2010	8:49:36 PM	Helium valve opened
10/1/2010	8:50:27 PM	Helium valve closed
10/1/2010	8:50:29 PM	Helium MFC set to  0.000000
10/1/2010	8:50:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	8:50:31 PM	Recipe started at 8:50 PM
10/1/2010	8:50:31 PM	Helium valve closed
10/1/2010	8:50:31 PM	H2 valve closed
10/1/2010	8:50:31 PM	BCl3 valve closed
10/1/2010	8:50:31 PM	PH3 valve closed
10/1/2010	8:50:31 PM	SiCl4 pre valve closed
10/1/2010	8:50:31 PM	SiCl4 post valve closed
10/1/2010	8:50:31 PM	Main Vac valve closed
10/1/2010	8:50:31 PM	Bubbler valve closed
10/1/2010	8:50:31 PM	Bypass valve opened
10/1/2010	8:50:31 PM	Helium MFC set to  0.000000
10/1/2010	8:50:31 PM	H2 MFC set to  0.000000
10/1/2010	8:50:31 PM	BCl3 MFC set to  0.000000
10/1/2010	8:50:31 PM	PHl3 MFC set to  0.000000
10/1/2010	8:50:31 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:50:31 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:50:31 PM	Tube furnace set to 0
10/1/2010	8:50:32 PM	Helium valve closed
10/1/2010	8:50:32 PM	H2 valve closed
10/1/2010	8:50:32 PM	BCl3 valve closed
10/1/2010	8:50:32 PM	PH3 valve closed
10/1/2010	8:50:32 PM	SiCl4 pre valve closed
10/1/2010	8:50:32 PM	SiCl4 post valve closed
10/1/2010	8:50:32 PM	Bubbler valve closed
10/1/2010	8:50:32 PM	Main Vac valve opened
10/1/2010	8:50:32 PM	Bypass valve opened
10/1/2010	8:50:32 PM	Helium MFC set to  0.000000
10/1/2010	8:50:32 PM	H2 MFC set to  0.000000
10/1/2010	8:50:32 PM	BCl3 MFC set to  0.000000
10/1/2010	8:50:32 PM	PHl3 MFC set to  0.000000
10/1/2010	8:50:32 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:50:32 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:50:32 PM	Tube furnace set to 0
10/1/2010	8:50:32 PM	Run finished at 8:50 PM
10/1/2010	8:50:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	8:51:18 PM	Recipe started at 8:51 PM
10/1/2010	8:51:18 PM	Helium valve closed
10/1/2010	8:51:18 PM	BCl3 valve closed
10/1/2010	8:51:18 PM	PH3 valve closed
10/1/2010	8:51:18 PM	SiCl4 pre valve closed
10/1/2010	8:51:18 PM	SiCl4 post valve closed
10/1/2010	8:51:18 PM	Main Vac valve closed
10/1/2010	8:51:18 PM	Bypass valve closed
10/1/2010	8:51:18 PM	Bubbler valve closed
10/1/2010	8:51:18 PM	H2 valve opened
10/1/2010	8:51:18 PM	Helium MFC set to  0.000000
10/1/2010	8:51:18 PM	H2 MFC set to  500.000000
10/1/2010	8:51:18 PM	BCl3 MFC set to  0.000000
10/1/2010	8:51:18 PM	PHl3 MFC set to  0.000000
10/1/2010	8:51:18 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:51:18 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:51:19 PM	Tube furnace set to 1000
10/1/2010	8:52:36 PM	Helium valve closed
10/1/2010	8:52:36 PM	BCl3 valve closed
10/1/2010	8:52:36 PM	PH3 valve closed
10/1/2010	8:52:36 PM	SiCl4 pre valve closed
10/1/2010	8:52:36 PM	SiCl4 post valve closed
10/1/2010	8:52:36 PM	Main Vac valve closed
10/1/2010	8:52:36 PM	Bypass valve closed
10/1/2010	8:52:36 PM	H2 valve opened
10/1/2010	8:52:36 PM	Bubbler valve opened
10/1/2010	8:52:36 PM	Helium MFC set to  0.000000
10/1/2010	8:52:36 PM	H2 MFC set to  500.000000
10/1/2010	8:52:36 PM	BCl3 MFC set to  0.000000
10/1/2010	8:52:36 PM	PHl3 MFC set to  0.000000
10/1/2010	8:52:36 PM	SiCl4 MFC set to  0.000000
10/1/2010	8:52:36 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	8:52:36 PM	Tube furnace set to 1000
10/1/2010	9:12:36 PM	Helium valve closed
10/1/2010	9:12:36 PM	PH3 valve closed
10/1/2010	9:12:36 PM	Main Vac valve closed
10/1/2010	9:12:36 PM	Bypass valve closed
10/1/2010	9:12:36 PM	H2 valve opened
10/1/2010	9:12:36 PM	BCl3 valve opened
10/1/2010	9:12:36 PM	SiCl4 pre valve opened
10/1/2010	9:12:36 PM	SiCl4 post valve opened
10/1/2010	9:12:36 PM	Bubbler valve opened
10/1/2010	9:12:36 PM	Helium MFC set to  0.000000
10/1/2010	9:12:36 PM	H2 MFC set to  500.000000
10/1/2010	9:12:36 PM	BCl3 MFC set to  12.000000
10/1/2010	9:12:36 PM	PHl3 MFC set to  0.000000
10/1/2010	9:12:36 PM	SiCl4 MFC set to  50.000000
10/1/2010	9:12:36 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	9:12:37 PM	Tube furnace set to 1000
10/1/2010	9:25:57 PM	Helium valve closed
10/1/2010	9:25:57 PM	BCl3 valve closed
10/1/2010	9:25:57 PM	PH3 valve closed
10/1/2010	9:25:57 PM	SiCl4 pre valve closed
10/1/2010	9:25:57 PM	SiCl4 post valve closed
10/1/2010	9:25:57 PM	Main Vac valve closed
10/1/2010	9:25:57 PM	Bypass valve closed
10/1/2010	9:25:57 PM	H2 valve opened
10/1/2010	9:25:57 PM	Bubbler valve opened
10/1/2010	9:25:57 PM	Helium MFC set to  0.000000
10/1/2010	9:25:57 PM	H2 MFC set to  500.000000
10/1/2010	9:25:57 PM	BCl3 MFC set to  0.000000
10/1/2010	9:25:57 PM	PHl3 MFC set to  0.000000
10/1/2010	9:25:57 PM	SiCl4 MFC set to  0.000000
10/1/2010	9:25:57 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	9:25:57 PM	Tube furnace set to 750
10/1/2010	9:45:57 PM	H2 valve closed
10/1/2010	9:45:57 PM	BCl3 valve closed
10/1/2010	9:45:57 PM	PH3 valve closed
10/1/2010	9:45:57 PM	SiCl4 pre valve closed
10/1/2010	9:45:57 PM	SiCl4 post valve closed
10/1/2010	9:45:57 PM	Main Vac valve closed
10/1/2010	9:45:57 PM	Bypass valve closed
10/1/2010	9:45:57 PM	Helium valve opened
10/1/2010	9:45:57 PM	Bubbler valve opened
10/1/2010	9:45:57 PM	Helium MFC set to  500.000000
10/1/2010	9:45:57 PM	H2 MFC set to  0.000000
10/1/2010	9:45:57 PM	BCl3 MFC set to  0.000000
10/1/2010	9:45:57 PM	PHl3 MFC set to  0.000000
10/1/2010	9:45:57 PM	SiCl4 MFC set to  0.000000
10/1/2010	9:45:57 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	9:45:57 PM	Tube furnace set to 0
10/1/2010	10:05:57 PM	Helium valve closed
10/1/2010	10:05:57 PM	H2 valve closed
10/1/2010	10:05:57 PM	BCl3 valve closed
10/1/2010	10:05:57 PM	PH3 valve closed
10/1/2010	10:05:57 PM	SiCl4 pre valve closed
10/1/2010	10:05:57 PM	SiCl4 post valve closed
10/1/2010	10:05:57 PM	Main Vac valve closed
10/1/2010	10:05:57 PM	Bypass valve closed
10/1/2010	10:05:57 PM	Bubbler valve closed
10/1/2010	10:05:57 PM	Helium MFC set to  0.000000
10/1/2010	10:05:57 PM	H2 MFC set to  0.000000
10/1/2010	10:05:57 PM	BCl3 MFC set to  0.000000
10/1/2010	10:05:57 PM	PHl3 MFC set to  0.000000
10/1/2010	10:05:57 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:05:57 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:05:57 PM	Tube furnace set to 0
10/1/2010	10:05:58 PM	Run finished at 10:05 PM
10/1/2010	10:14:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2010	10:14:10 PM	Recipe started at 10:14 PM
10/1/2010	10:14:10 PM	H2 valve closed
10/1/2010	10:14:10 PM	BCl3 valve closed
10/1/2010	10:14:10 PM	PH3 valve closed
10/1/2010	10:14:10 PM	SiCl4 pre valve closed
10/1/2010	10:14:10 PM	SiCl4 post valve closed
10/1/2010	10:14:10 PM	Main Vac valve closed
10/1/2010	10:14:10 PM	Bypass valve closed
10/1/2010	10:14:10 PM	Bubbler valve closed
10/1/2010	10:14:10 PM	Helium valve opened
10/1/2010	10:14:10 PM	Helium MFC set to  500.000000
10/1/2010	10:14:10 PM	H2 MFC set to  0.000000
10/1/2010	10:14:10 PM	BCl3 MFC set to  0.000000
10/1/2010	10:14:10 PM	PHl3 MFC set to  0.000000
10/1/2010	10:14:10 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:14:10 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:14:11 PM	Tube furnace set to 0
10/1/2010	10:14:12 PM	Helium valve closed
10/1/2010	10:14:12 PM	H2 valve closed
10/1/2010	10:14:12 PM	BCl3 valve closed
10/1/2010	10:14:12 PM	PH3 valve closed
10/1/2010	10:14:12 PM	SiCl4 pre valve closed
10/1/2010	10:14:12 PM	SiCl4 post valve closed
10/1/2010	10:14:12 PM	Main Vac valve closed
10/1/2010	10:14:12 PM	Bypass valve closed
10/1/2010	10:14:12 PM	Bubbler valve closed
10/1/2010	10:14:12 PM	Helium MFC set to  0.000000
10/1/2010	10:14:12 PM	H2 MFC set to  0.000000
10/1/2010	10:14:12 PM	BCl3 MFC set to  0.000000
10/1/2010	10:14:12 PM	PHl3 MFC set to  0.000000
10/1/2010	10:14:12 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:14:12 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:14:12 PM	Tube furnace set to 0
10/1/2010	10:14:12 PM	Run finished at 10:14 PM
10/1/2010	10:14:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2010	10:22:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	10:22:52 PM	Recipe started at 10:22 PM
10/1/2010	10:22:52 PM	Helium valve closed
10/1/2010	10:22:52 PM	H2 valve closed
10/1/2010	10:22:52 PM	BCl3 valve closed
10/1/2010	10:22:52 PM	PH3 valve closed
10/1/2010	10:22:52 PM	SiCl4 pre valve closed
10/1/2010	10:22:52 PM	SiCl4 post valve closed
10/1/2010	10:22:52 PM	Main Vac valve closed
10/1/2010	10:22:52 PM	Bubbler valve closed
10/1/2010	10:22:52 PM	Bypass valve opened
10/1/2010	10:22:52 PM	Helium MFC set to  0.000000
10/1/2010	10:22:52 PM	H2 MFC set to  0.000000
10/1/2010	10:22:52 PM	BCl3 MFC set to  0.000000
10/1/2010	10:22:52 PM	PHl3 MFC set to  0.000000
10/1/2010	10:22:52 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:22:52 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:22:52 PM	Tube furnace set to 0
10/1/2010	10:23:34 PM	Helium valve closed
10/1/2010	10:23:34 PM	H2 valve closed
10/1/2010	10:23:34 PM	BCl3 valve closed
10/1/2010	10:23:34 PM	PH3 valve closed
10/1/2010	10:23:34 PM	SiCl4 pre valve closed
10/1/2010	10:23:34 PM	SiCl4 post valve closed
10/1/2010	10:23:34 PM	Bubbler valve closed
10/1/2010	10:23:34 PM	Main Vac valve opened
10/1/2010	10:23:34 PM	Bypass valve opened
10/1/2010	10:23:34 PM	Helium MFC set to  0.000000
10/1/2010	10:23:34 PM	H2 MFC set to  0.000000
10/1/2010	10:23:34 PM	BCl3 MFC set to  0.000000
10/1/2010	10:23:34 PM	PHl3 MFC set to  0.000000
10/1/2010	10:23:34 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:23:34 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:23:34 PM	Tube furnace set to 0
10/1/2010	10:23:34 PM	Run finished at 10:23 PM
10/1/2010	10:23:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	10:23:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	10:23:59 PM	Recipe started at 10:23 PM
10/1/2010	10:23:59 PM	Helium valve closed
10/1/2010	10:23:59 PM	H2 valve closed
10/1/2010	10:23:59 PM	BCl3 valve closed
10/1/2010	10:23:59 PM	PH3 valve closed
10/1/2010	10:23:59 PM	SiCl4 pre valve closed
10/1/2010	10:23:59 PM	SiCl4 post valve closed
10/1/2010	10:23:59 PM	Main Vac valve closed
10/1/2010	10:23:59 PM	Bubbler valve closed
10/1/2010	10:23:59 PM	Bypass valve opened
10/1/2010	10:23:59 PM	Helium MFC set to  0.000000
10/1/2010	10:23:59 PM	H2 MFC set to  0.000000
10/1/2010	10:23:59 PM	BCl3 MFC set to  0.000000
10/1/2010	10:23:59 PM	PHl3 MFC set to  0.000000
10/1/2010	10:23:59 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:23:59 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:23:59 PM	Tube furnace set to 0
10/1/2010	10:24:00 PM	Helium valve closed
10/1/2010	10:24:00 PM	H2 valve closed
10/1/2010	10:24:00 PM	BCl3 valve closed
10/1/2010	10:24:00 PM	PH3 valve closed
10/1/2010	10:24:00 PM	SiCl4 pre valve closed
10/1/2010	10:24:00 PM	SiCl4 post valve closed
10/1/2010	10:24:00 PM	Bubbler valve closed
10/1/2010	10:24:00 PM	Main Vac valve opened
10/1/2010	10:24:00 PM	Bypass valve opened
10/1/2010	10:24:00 PM	Helium MFC set to  0.000000
10/1/2010	10:24:00 PM	H2 MFC set to  0.000000
10/1/2010	10:24:00 PM	BCl3 MFC set to  0.000000
10/1/2010	10:24:00 PM	PHl3 MFC set to  0.000000
10/1/2010	10:24:00 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:24:00 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:24:00 PM	Tube furnace set to 0
10/1/2010	10:25:00 PM	H2 valve closed
10/1/2010	10:25:00 PM	BCl3 valve closed
10/1/2010	10:25:00 PM	PH3 valve closed
10/1/2010	10:25:00 PM	SiCl4 pre valve closed
10/1/2010	10:25:00 PM	SiCl4 post valve closed
10/1/2010	10:25:00 PM	Bubbler valve closed
10/1/2010	10:25:00 PM	Helium valve opened
10/1/2010	10:25:00 PM	Main Vac valve opened
10/1/2010	10:25:00 PM	Bypass valve opened
10/1/2010	10:25:00 PM	Helium MFC set to  100.000000
10/1/2010	10:25:00 PM	H2 MFC set to  0.000000
10/1/2010	10:25:00 PM	BCl3 MFC set to  0.000000
10/1/2010	10:25:00 PM	PHl3 MFC set to  0.000000
10/1/2010	10:25:00 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:25:00 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:25:00 PM	Tube furnace set to 0
10/1/2010	10:26:00 PM	Helium valve closed
10/1/2010	10:26:00 PM	H2 valve closed
10/1/2010	10:26:00 PM	BCl3 valve closed
10/1/2010	10:26:00 PM	PH3 valve closed
10/1/2010	10:26:00 PM	SiCl4 pre valve closed
10/1/2010	10:26:00 PM	SiCl4 post valve closed
10/1/2010	10:26:00 PM	Bubbler valve closed
10/1/2010	10:26:00 PM	Main Vac valve opened
10/1/2010	10:26:00 PM	Bypass valve opened
10/1/2010	10:26:00 PM	Helium MFC set to  0.000000
10/1/2010	10:26:00 PM	H2 MFC set to  0.000000
10/1/2010	10:26:00 PM	BCl3 MFC set to  0.000000
10/1/2010	10:26:00 PM	PHl3 MFC set to  0.000000
10/1/2010	10:26:00 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:26:00 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:26:00 PM	Tube furnace set to 0
10/1/2010	10:27:00 PM	H2 valve closed
10/1/2010	10:27:00 PM	BCl3 valve closed
10/1/2010	10:27:00 PM	PH3 valve closed
10/1/2010	10:27:00 PM	SiCl4 pre valve closed
10/1/2010	10:27:00 PM	SiCl4 post valve closed
10/1/2010	10:27:00 PM	Bubbler valve closed
10/1/2010	10:27:00 PM	Helium valve opened
10/1/2010	10:27:00 PM	Main Vac valve opened
10/1/2010	10:27:00 PM	Bypass valve opened
10/1/2010	10:27:00 PM	Helium MFC set to  100.000000
10/1/2010	10:27:00 PM	H2 MFC set to  0.000000
10/1/2010	10:27:00 PM	BCl3 MFC set to  0.000000
10/1/2010	10:27:00 PM	PHl3 MFC set to  0.000000
10/1/2010	10:27:00 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:27:00 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:27:00 PM	Tube furnace set to 0
10/1/2010	10:28:01 PM	Helium valve closed
10/1/2010	10:28:01 PM	H2 valve closed
10/1/2010	10:28:01 PM	BCl3 valve closed
10/1/2010	10:28:01 PM	PH3 valve closed
10/1/2010	10:28:01 PM	SiCl4 pre valve closed
10/1/2010	10:28:01 PM	SiCl4 post valve closed
10/1/2010	10:28:01 PM	Bubbler valve closed
10/1/2010	10:28:01 PM	Main Vac valve opened
10/1/2010	10:28:01 PM	Bypass valve opened
10/1/2010	10:28:01 PM	Helium MFC set to  0.000000
10/1/2010	10:28:01 PM	H2 MFC set to  0.000000
10/1/2010	10:28:01 PM	BCl3 MFC set to  0.000000
10/1/2010	10:28:01 PM	PHl3 MFC set to  0.000000
10/1/2010	10:28:01 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:28:01 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:28:01 PM	Tube furnace set to 0
10/1/2010	10:29:01 PM	H2 valve closed
10/1/2010	10:29:01 PM	BCl3 valve closed
10/1/2010	10:29:01 PM	PH3 valve closed
10/1/2010	10:29:01 PM	SiCl4 pre valve closed
10/1/2010	10:29:01 PM	SiCl4 post valve closed
10/1/2010	10:29:01 PM	Bubbler valve closed
10/1/2010	10:29:01 PM	Helium valve opened
10/1/2010	10:29:01 PM	Main Vac valve opened
10/1/2010	10:29:01 PM	Bypass valve opened
10/1/2010	10:29:01 PM	Helium MFC set to  100.000000
10/1/2010	10:29:01 PM	H2 MFC set to  0.000000
10/1/2010	10:29:01 PM	BCl3 MFC set to  0.000000
10/1/2010	10:29:01 PM	PHl3 MFC set to  0.000000
10/1/2010	10:29:01 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:29:01 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:29:01 PM	Tube furnace set to 0
10/1/2010	10:30:01 PM	Helium valve closed
10/1/2010	10:30:01 PM	H2 valve closed
10/1/2010	10:30:01 PM	BCl3 valve closed
10/1/2010	10:30:01 PM	PH3 valve closed
10/1/2010	10:30:01 PM	SiCl4 pre valve closed
10/1/2010	10:30:01 PM	SiCl4 post valve closed
10/1/2010	10:30:01 PM	Bubbler valve closed
10/1/2010	10:30:01 PM	Main Vac valve opened
10/1/2010	10:30:01 PM	Bypass valve opened
10/1/2010	10:30:01 PM	Helium MFC set to  0.000000
10/1/2010	10:30:01 PM	H2 MFC set to  0.000000
10/1/2010	10:30:01 PM	BCl3 MFC set to  0.000000
10/1/2010	10:30:01 PM	PHl3 MFC set to  0.000000
10/1/2010	10:30:01 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:30:01 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:30:01 PM	Tube furnace set to 0
10/1/2010	10:31:01 PM	H2 valve closed
10/1/2010	10:31:01 PM	BCl3 valve closed
10/1/2010	10:31:01 PM	PH3 valve closed
10/1/2010	10:31:01 PM	SiCl4 pre valve closed
10/1/2010	10:31:01 PM	SiCl4 post valve closed
10/1/2010	10:31:01 PM	Bubbler valve closed
10/1/2010	10:31:01 PM	Helium valve opened
10/1/2010	10:31:01 PM	Main Vac valve opened
10/1/2010	10:31:01 PM	Bypass valve opened
10/1/2010	10:31:01 PM	Helium MFC set to  100.000000
10/1/2010	10:31:01 PM	H2 MFC set to  0.000000
10/1/2010	10:31:01 PM	BCl3 MFC set to  0.000000
10/1/2010	10:31:01 PM	PHl3 MFC set to  0.000000
10/1/2010	10:31:01 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:31:01 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:31:01 PM	Tube furnace set to 0
10/1/2010	10:32:01 PM	Helium valve closed
10/1/2010	10:32:01 PM	H2 valve closed
10/1/2010	10:32:01 PM	BCl3 valve closed
10/1/2010	10:32:01 PM	PH3 valve closed
10/1/2010	10:32:01 PM	SiCl4 pre valve closed
10/1/2010	10:32:01 PM	SiCl4 post valve closed
10/1/2010	10:32:01 PM	Bubbler valve closed
10/1/2010	10:32:01 PM	Main Vac valve opened
10/1/2010	10:32:01 PM	Bypass valve opened
10/1/2010	10:32:01 PM	Helium MFC set to  0.000000
10/1/2010	10:32:01 PM	H2 MFC set to  0.000000
10/1/2010	10:32:01 PM	BCl3 MFC set to  0.000000
10/1/2010	10:32:01 PM	PHl3 MFC set to  0.000000
10/1/2010	10:32:01 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:32:01 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:32:02 PM	Tube furnace set to 0
10/1/2010	10:33:02 PM	H2 valve closed
10/1/2010	10:33:02 PM	BCl3 valve closed
10/1/2010	10:33:02 PM	PH3 valve closed
10/1/2010	10:33:02 PM	SiCl4 pre valve closed
10/1/2010	10:33:02 PM	SiCl4 post valve closed
10/1/2010	10:33:02 PM	Bubbler valve closed
10/1/2010	10:33:02 PM	Helium valve opened
10/1/2010	10:33:02 PM	Main Vac valve opened
10/1/2010	10:33:02 PM	Bypass valve opened
10/1/2010	10:33:02 PM	Helium MFC set to  100.000000
10/1/2010	10:33:02 PM	H2 MFC set to  0.000000
10/1/2010	10:33:02 PM	BCl3 MFC set to  0.000000
10/1/2010	10:33:02 PM	PHl3 MFC set to  0.000000
10/1/2010	10:33:02 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:33:02 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:33:02 PM	Tube furnace set to 0
10/1/2010	10:34:02 PM	Helium valve closed
10/1/2010	10:34:02 PM	H2 valve closed
10/1/2010	10:34:02 PM	BCl3 valve closed
10/1/2010	10:34:02 PM	PH3 valve closed
10/1/2010	10:34:02 PM	SiCl4 pre valve closed
10/1/2010	10:34:02 PM	SiCl4 post valve closed
10/1/2010	10:34:02 PM	Bubbler valve closed
10/1/2010	10:34:02 PM	Main Vac valve opened
10/1/2010	10:34:02 PM	Bypass valve opened
10/1/2010	10:34:02 PM	Helium MFC set to  0.000000
10/1/2010	10:34:02 PM	H2 MFC set to  0.000000
10/1/2010	10:34:02 PM	BCl3 MFC set to  0.000000
10/1/2010	10:34:02 PM	PHl3 MFC set to  0.000000
10/1/2010	10:34:02 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:34:02 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:34:02 PM	Tube furnace set to 0
10/1/2010	10:35:02 PM	H2 valve closed
10/1/2010	10:35:02 PM	BCl3 valve closed
10/1/2010	10:35:02 PM	PH3 valve closed
10/1/2010	10:35:02 PM	SiCl4 pre valve closed
10/1/2010	10:35:02 PM	SiCl4 post valve closed
10/1/2010	10:35:02 PM	Bubbler valve closed
10/1/2010	10:35:02 PM	Helium valve opened
10/1/2010	10:35:02 PM	Main Vac valve opened
10/1/2010	10:35:02 PM	Bypass valve opened
10/1/2010	10:35:02 PM	Helium MFC set to  100.000000
10/1/2010	10:35:02 PM	H2 MFC set to  0.000000
10/1/2010	10:35:02 PM	BCl3 MFC set to  0.000000
10/1/2010	10:35:02 PM	PHl3 MFC set to  0.000000
10/1/2010	10:35:02 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:35:02 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:35:02 PM	Tube furnace set to 0
10/1/2010	10:36:02 PM	Helium valve closed
10/1/2010	10:36:02 PM	H2 valve closed
10/1/2010	10:36:02 PM	BCl3 valve closed
10/1/2010	10:36:02 PM	PH3 valve closed
10/1/2010	10:36:02 PM	SiCl4 pre valve closed
10/1/2010	10:36:02 PM	SiCl4 post valve closed
10/1/2010	10:36:02 PM	Bubbler valve closed
10/1/2010	10:36:02 PM	Main Vac valve opened
10/1/2010	10:36:02 PM	Bypass valve opened
10/1/2010	10:36:02 PM	Helium MFC set to  0.000000
10/1/2010	10:36:02 PM	H2 MFC set to  0.000000
10/1/2010	10:36:02 PM	BCl3 MFC set to  0.000000
10/1/2010	10:36:02 PM	PHl3 MFC set to  0.000000
10/1/2010	10:36:02 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:36:02 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:36:02 PM	Tube furnace set to 0
10/1/2010	10:37:02 PM	H2 valve closed
10/1/2010	10:37:02 PM	BCl3 valve closed
10/1/2010	10:37:02 PM	PH3 valve closed
10/1/2010	10:37:02 PM	SiCl4 pre valve closed
10/1/2010	10:37:02 PM	SiCl4 post valve closed
10/1/2010	10:37:02 PM	Bubbler valve closed
10/1/2010	10:37:02 PM	Helium valve opened
10/1/2010	10:37:02 PM	Main Vac valve opened
10/1/2010	10:37:02 PM	Bypass valve opened
10/1/2010	10:37:02 PM	Helium MFC set to  100.000000
10/1/2010	10:37:02 PM	H2 MFC set to  0.000000
10/1/2010	10:37:02 PM	BCl3 MFC set to  0.000000
10/1/2010	10:37:02 PM	PHl3 MFC set to  0.000000
10/1/2010	10:37:02 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:37:02 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:37:03 PM	Tube furnace set to 0
10/1/2010	10:38:03 PM	Helium valve closed
10/1/2010	10:38:03 PM	H2 valve closed
10/1/2010	10:38:03 PM	BCl3 valve closed
10/1/2010	10:38:03 PM	PH3 valve closed
10/1/2010	10:38:03 PM	SiCl4 pre valve closed
10/1/2010	10:38:03 PM	SiCl4 post valve closed
10/1/2010	10:38:03 PM	Bubbler valve closed
10/1/2010	10:38:03 PM	Main Vac valve opened
10/1/2010	10:38:03 PM	Bypass valve opened
10/1/2010	10:38:03 PM	Helium MFC set to  0.000000
10/1/2010	10:38:03 PM	H2 MFC set to  0.000000
10/1/2010	10:38:03 PM	BCl3 MFC set to  0.000000
10/1/2010	10:38:03 PM	PHl3 MFC set to  0.000000
10/1/2010	10:38:03 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:38:03 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:38:03 PM	Tube furnace set to 0
10/1/2010	10:39:03 PM	H2 valve closed
10/1/2010	10:39:03 PM	BCl3 valve closed
10/1/2010	10:39:03 PM	PH3 valve closed
10/1/2010	10:39:03 PM	SiCl4 pre valve closed
10/1/2010	10:39:03 PM	SiCl4 post valve closed
10/1/2010	10:39:03 PM	Bubbler valve closed
10/1/2010	10:39:03 PM	Helium valve opened
10/1/2010	10:39:03 PM	Main Vac valve opened
10/1/2010	10:39:03 PM	Bypass valve opened
10/1/2010	10:39:03 PM	Helium MFC set to  100.000000
10/1/2010	10:39:03 PM	H2 MFC set to  0.000000
10/1/2010	10:39:03 PM	BCl3 MFC set to  0.000000
10/1/2010	10:39:03 PM	PHl3 MFC set to  0.000000
10/1/2010	10:39:03 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:39:03 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:39:03 PM	Tube furnace set to 0
10/1/2010	10:40:03 PM	Helium valve closed
10/1/2010	10:40:03 PM	H2 valve closed
10/1/2010	10:40:03 PM	BCl3 valve closed
10/1/2010	10:40:03 PM	PH3 valve closed
10/1/2010	10:40:03 PM	SiCl4 pre valve closed
10/1/2010	10:40:03 PM	SiCl4 post valve closed
10/1/2010	10:40:03 PM	Bubbler valve closed
10/1/2010	10:40:03 PM	Main Vac valve opened
10/1/2010	10:40:03 PM	Bypass valve opened
10/1/2010	10:40:03 PM	Helium MFC set to  0.000000
10/1/2010	10:40:03 PM	H2 MFC set to  0.000000
10/1/2010	10:40:03 PM	BCl3 MFC set to  0.000000
10/1/2010	10:40:03 PM	PHl3 MFC set to  0.000000
10/1/2010	10:40:03 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:40:03 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:40:03 PM	Tube furnace set to 0
10/1/2010	10:41:03 PM	H2 valve closed
10/1/2010	10:41:03 PM	BCl3 valve closed
10/1/2010	10:41:03 PM	PH3 valve closed
10/1/2010	10:41:03 PM	SiCl4 pre valve closed
10/1/2010	10:41:03 PM	SiCl4 post valve closed
10/1/2010	10:41:03 PM	Bubbler valve closed
10/1/2010	10:41:03 PM	Helium valve opened
10/1/2010	10:41:03 PM	Main Vac valve opened
10/1/2010	10:41:03 PM	Bypass valve opened
10/1/2010	10:41:03 PM	Helium MFC set to  100.000000
10/1/2010	10:41:03 PM	H2 MFC set to  0.000000
10/1/2010	10:41:03 PM	BCl3 MFC set to  0.000000
10/1/2010	10:41:03 PM	PHl3 MFC set to  0.000000
10/1/2010	10:41:03 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:41:03 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:41:03 PM	Tube furnace set to 0
10/1/2010	10:42:03 PM	Helium valve closed
10/1/2010	10:42:03 PM	H2 valve closed
10/1/2010	10:42:03 PM	BCl3 valve closed
10/1/2010	10:42:03 PM	PH3 valve closed
10/1/2010	10:42:03 PM	SiCl4 pre valve closed
10/1/2010	10:42:03 PM	SiCl4 post valve closed
10/1/2010	10:42:03 PM	Bubbler valve closed
10/1/2010	10:42:03 PM	Main Vac valve opened
10/1/2010	10:42:03 PM	Bypass valve opened
10/1/2010	10:42:03 PM	Helium MFC set to  0.000000
10/1/2010	10:42:03 PM	H2 MFC set to  0.000000
10/1/2010	10:42:03 PM	BCl3 MFC set to  0.000000
10/1/2010	10:42:03 PM	PHl3 MFC set to  0.000000
10/1/2010	10:42:03 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:42:03 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:42:04 PM	Tube furnace set to 0
10/1/2010	10:43:04 PM	H2 valve closed
10/1/2010	10:43:04 PM	BCl3 valve closed
10/1/2010	10:43:04 PM	PH3 valve closed
10/1/2010	10:43:04 PM	SiCl4 pre valve closed
10/1/2010	10:43:04 PM	SiCl4 post valve closed
10/1/2010	10:43:04 PM	Bubbler valve closed
10/1/2010	10:43:04 PM	Helium valve opened
10/1/2010	10:43:04 PM	Main Vac valve opened
10/1/2010	10:43:04 PM	Bypass valve opened
10/1/2010	10:43:04 PM	Helium MFC set to  100.000000
10/1/2010	10:43:04 PM	H2 MFC set to  0.000000
10/1/2010	10:43:04 PM	BCl3 MFC set to  0.000000
10/1/2010	10:43:04 PM	PHl3 MFC set to  0.000000
10/1/2010	10:43:04 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:43:04 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:43:04 PM	Tube furnace set to 0
10/1/2010	10:44:04 PM	Helium valve closed
10/1/2010	10:44:04 PM	H2 valve closed
10/1/2010	10:44:04 PM	BCl3 valve closed
10/1/2010	10:44:04 PM	PH3 valve closed
10/1/2010	10:44:04 PM	SiCl4 pre valve closed
10/1/2010	10:44:04 PM	SiCl4 post valve closed
10/1/2010	10:44:04 PM	Bubbler valve closed
10/1/2010	10:44:04 PM	Main Vac valve opened
10/1/2010	10:44:04 PM	Bypass valve opened
10/1/2010	10:44:04 PM	Helium MFC set to  0.000000
10/1/2010	10:44:04 PM	H2 MFC set to  0.000000
10/1/2010	10:44:04 PM	BCl3 MFC set to  0.000000
10/1/2010	10:44:04 PM	PHl3 MFC set to  0.000000
10/1/2010	10:44:04 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:44:04 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:44:04 PM	Tube furnace set to 0
10/1/2010	10:44:05 PM	Run finished at 10:44 PM
10/1/2010	10:44:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	10:45:24 PM	Helium MFC set to  100.000000
10/1/2010	10:45:26 PM	Helium valve opened
10/1/2010	10:45:39 PM	Helium MFC set to  100.000000
10/1/2010	10:45:39 PM	Helium valve closed
10/1/2010	10:45:41 PM	Helium MFC set to  0.000000
10/1/2010	10:45:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	10:45:55 PM	Recipe started at 10:45 PM
10/1/2010	10:45:55 PM	Helium valve closed
10/1/2010	10:45:55 PM	H2 valve closed
10/1/2010	10:45:55 PM	BCl3 valve closed
10/1/2010	10:45:55 PM	PH3 valve closed
10/1/2010	10:45:55 PM	SiCl4 pre valve closed
10/1/2010	10:45:55 PM	SiCl4 post valve closed
10/1/2010	10:45:55 PM	Main Vac valve closed
10/1/2010	10:45:55 PM	Bubbler valve closed
10/1/2010	10:45:55 PM	Bypass valve opened
10/1/2010	10:45:55 PM	Helium MFC set to  0.000000
10/1/2010	10:45:55 PM	H2 MFC set to  0.000000
10/1/2010	10:45:55 PM	BCl3 MFC set to  0.000000
10/1/2010	10:45:55 PM	PHl3 MFC set to  0.000000
10/1/2010	10:45:55 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:45:55 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:45:56 PM	Tube furnace set to 0
10/1/2010	10:45:56 PM	Helium valve closed
10/1/2010	10:45:56 PM	H2 valve closed
10/1/2010	10:45:56 PM	BCl3 valve closed
10/1/2010	10:45:56 PM	PH3 valve closed
10/1/2010	10:45:56 PM	SiCl4 pre valve closed
10/1/2010	10:45:56 PM	SiCl4 post valve closed
10/1/2010	10:45:56 PM	Bubbler valve closed
10/1/2010	10:45:56 PM	Main Vac valve opened
10/1/2010	10:45:56 PM	Bypass valve opened
10/1/2010	10:45:56 PM	Helium MFC set to  0.000000
10/1/2010	10:45:56 PM	H2 MFC set to  0.000000
10/1/2010	10:45:56 PM	BCl3 MFC set to  0.000000
10/1/2010	10:45:56 PM	PHl3 MFC set to  0.000000
10/1/2010	10:45:56 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:45:56 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:45:56 PM	Tube furnace set to 0
10/1/2010	10:46:56 PM	H2 valve closed
10/1/2010	10:46:56 PM	BCl3 valve closed
10/1/2010	10:46:56 PM	PH3 valve closed
10/1/2010	10:46:56 PM	SiCl4 pre valve closed
10/1/2010	10:46:56 PM	SiCl4 post valve closed
10/1/2010	10:46:56 PM	Bubbler valve closed
10/1/2010	10:46:56 PM	Helium valve opened
10/1/2010	10:46:56 PM	Main Vac valve opened
10/1/2010	10:46:56 PM	Bypass valve opened
10/1/2010	10:46:56 PM	Helium MFC set to  100.000000
10/1/2010	10:46:56 PM	H2 MFC set to  0.000000
10/1/2010	10:46:56 PM	BCl3 MFC set to  0.000000
10/1/2010	10:46:56 PM	PHl3 MFC set to  0.000000
10/1/2010	10:46:56 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:46:56 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:46:56 PM	Tube furnace set to 0
10/1/2010	10:47:56 PM	Helium valve closed
10/1/2010	10:47:56 PM	H2 valve closed
10/1/2010	10:47:56 PM	BCl3 valve closed
10/1/2010	10:47:56 PM	PH3 valve closed
10/1/2010	10:47:56 PM	SiCl4 pre valve closed
10/1/2010	10:47:56 PM	SiCl4 post valve closed
10/1/2010	10:47:56 PM	Bubbler valve closed
10/1/2010	10:47:56 PM	Main Vac valve opened
10/1/2010	10:47:56 PM	Bypass valve opened
10/1/2010	10:47:56 PM	Helium MFC set to  0.000000
10/1/2010	10:47:56 PM	H2 MFC set to  0.000000
10/1/2010	10:47:56 PM	BCl3 MFC set to  0.000000
10/1/2010	10:47:56 PM	PHl3 MFC set to  0.000000
10/1/2010	10:47:56 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:47:56 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:47:56 PM	Tube furnace set to 0
10/1/2010	10:48:56 PM	H2 valve closed
10/1/2010	10:48:56 PM	BCl3 valve closed
10/1/2010	10:48:56 PM	PH3 valve closed
10/1/2010	10:48:56 PM	SiCl4 pre valve closed
10/1/2010	10:48:56 PM	SiCl4 post valve closed
10/1/2010	10:48:56 PM	Bubbler valve closed
10/1/2010	10:48:56 PM	Helium valve opened
10/1/2010	10:48:56 PM	Main Vac valve opened
10/1/2010	10:48:56 PM	Bypass valve opened
10/1/2010	10:48:56 PM	Helium MFC set to  100.000000
10/1/2010	10:48:56 PM	H2 MFC set to  0.000000
10/1/2010	10:48:56 PM	BCl3 MFC set to  0.000000
10/1/2010	10:48:56 PM	PHl3 MFC set to  0.000000
10/1/2010	10:48:56 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:48:56 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:48:57 PM	Tube furnace set to 0
10/1/2010	10:49:57 PM	Helium valve closed
10/1/2010	10:49:57 PM	H2 valve closed
10/1/2010	10:49:57 PM	BCl3 valve closed
10/1/2010	10:49:57 PM	PH3 valve closed
10/1/2010	10:49:57 PM	SiCl4 pre valve closed
10/1/2010	10:49:57 PM	SiCl4 post valve closed
10/1/2010	10:49:57 PM	Bubbler valve closed
10/1/2010	10:49:57 PM	Main Vac valve opened
10/1/2010	10:49:57 PM	Bypass valve opened
10/1/2010	10:49:57 PM	Helium MFC set to  0.000000
10/1/2010	10:49:57 PM	H2 MFC set to  0.000000
10/1/2010	10:49:57 PM	BCl3 MFC set to  0.000000
10/1/2010	10:49:57 PM	PHl3 MFC set to  0.000000
10/1/2010	10:49:57 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:49:57 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:49:57 PM	Tube furnace set to 0
10/1/2010	10:50:57 PM	H2 valve closed
10/1/2010	10:50:57 PM	BCl3 valve closed
10/1/2010	10:50:57 PM	PH3 valve closed
10/1/2010	10:50:57 PM	SiCl4 pre valve closed
10/1/2010	10:50:57 PM	SiCl4 post valve closed
10/1/2010	10:50:57 PM	Bubbler valve closed
10/1/2010	10:50:57 PM	Helium valve opened
10/1/2010	10:50:57 PM	Main Vac valve opened
10/1/2010	10:50:57 PM	Bypass valve opened
10/1/2010	10:50:57 PM	Helium MFC set to  100.000000
10/1/2010	10:50:57 PM	H2 MFC set to  0.000000
10/1/2010	10:50:57 PM	BCl3 MFC set to  0.000000
10/1/2010	10:50:57 PM	PHl3 MFC set to  0.000000
10/1/2010	10:50:57 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:50:57 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:50:57 PM	Tube furnace set to 0
10/1/2010	10:51:57 PM	Helium valve closed
10/1/2010	10:51:57 PM	H2 valve closed
10/1/2010	10:51:57 PM	BCl3 valve closed
10/1/2010	10:51:57 PM	PH3 valve closed
10/1/2010	10:51:57 PM	SiCl4 pre valve closed
10/1/2010	10:51:57 PM	SiCl4 post valve closed
10/1/2010	10:51:57 PM	Bubbler valve closed
10/1/2010	10:51:57 PM	Main Vac valve opened
10/1/2010	10:51:57 PM	Bypass valve opened
10/1/2010	10:51:57 PM	Helium MFC set to  0.000000
10/1/2010	10:51:57 PM	H2 MFC set to  0.000000
10/1/2010	10:51:57 PM	BCl3 MFC set to  0.000000
10/1/2010	10:51:57 PM	PHl3 MFC set to  0.000000
10/1/2010	10:51:57 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:51:57 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:51:57 PM	Tube furnace set to 0
10/1/2010	10:52:57 PM	H2 valve closed
10/1/2010	10:52:57 PM	BCl3 valve closed
10/1/2010	10:52:57 PM	PH3 valve closed
10/1/2010	10:52:57 PM	SiCl4 pre valve closed
10/1/2010	10:52:57 PM	SiCl4 post valve closed
10/1/2010	10:52:57 PM	Bubbler valve closed
10/1/2010	10:52:57 PM	Helium valve opened
10/1/2010	10:52:57 PM	Main Vac valve opened
10/1/2010	10:52:57 PM	Bypass valve opened
10/1/2010	10:52:57 PM	Helium MFC set to  100.000000
10/1/2010	10:52:57 PM	H2 MFC set to  0.000000
10/1/2010	10:52:57 PM	BCl3 MFC set to  0.000000
10/1/2010	10:52:57 PM	PHl3 MFC set to  0.000000
10/1/2010	10:52:57 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:52:57 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:52:57 PM	Tube furnace set to 0
10/1/2010	10:53:27 PM	Helium valve closed
10/1/2010	10:53:27 PM	H2 valve closed
10/1/2010	10:53:27 PM	BCl3 valve closed
10/1/2010	10:53:27 PM	PH3 valve closed
10/1/2010	10:53:27 PM	SiCl4 pre valve closed
10/1/2010	10:53:27 PM	SiCl4 post valve closed
10/1/2010	10:53:27 PM	Bubbler valve closed
10/1/2010	10:53:27 PM	Main Vac valve opened
10/1/2010	10:53:27 PM	Bypass valve opened
10/1/2010	10:53:27 PM	Helium MFC set to  0.000000
10/1/2010	10:53:27 PM	H2 MFC set to  0.000000
10/1/2010	10:53:27 PM	BCl3 MFC set to  0.000000
10/1/2010	10:53:27 PM	PHl3 MFC set to  0.000000
10/1/2010	10:53:27 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:53:27 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:53:27 PM	Tube furnace set to 0
10/1/2010	10:53:27 PM	H2 valve closed
10/1/2010	10:53:27 PM	BCl3 valve closed
10/1/2010	10:53:27 PM	PH3 valve closed
10/1/2010	10:53:27 PM	SiCl4 pre valve closed
10/1/2010	10:53:27 PM	SiCl4 post valve closed
10/1/2010	10:53:27 PM	Bubbler valve closed
10/1/2010	10:53:27 PM	Helium valve opened
10/1/2010	10:53:27 PM	Main Vac valve opened
10/1/2010	10:53:27 PM	Bypass valve opened
10/1/2010	10:53:27 PM	Helium MFC set to  100.000000
10/1/2010	10:53:27 PM	H2 MFC set to  0.000000
10/1/2010	10:53:27 PM	BCl3 MFC set to  0.000000
10/1/2010	10:53:27 PM	PHl3 MFC set to  0.000000
10/1/2010	10:53:27 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:53:27 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:53:28 PM	Tube furnace set to 0
10/1/2010	10:53:28 PM	Helium valve closed
10/1/2010	10:53:28 PM	H2 valve closed
10/1/2010	10:53:28 PM	BCl3 valve closed
10/1/2010	10:53:28 PM	PH3 valve closed
10/1/2010	10:53:28 PM	SiCl4 pre valve closed
10/1/2010	10:53:28 PM	SiCl4 post valve closed
10/1/2010	10:53:28 PM	Bubbler valve closed
10/1/2010	10:53:28 PM	Main Vac valve opened
10/1/2010	10:53:28 PM	Bypass valve opened
10/1/2010	10:53:28 PM	Helium MFC set to  0.000000
10/1/2010	10:53:28 PM	H2 MFC set to  0.000000
10/1/2010	10:53:28 PM	BCl3 MFC set to  0.000000
10/1/2010	10:53:28 PM	PHl3 MFC set to  0.000000
10/1/2010	10:53:28 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:53:28 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:53:29 PM	Tube furnace set to 0
10/1/2010	10:53:29 PM	H2 valve closed
10/1/2010	10:53:29 PM	BCl3 valve closed
10/1/2010	10:53:29 PM	PH3 valve closed
10/1/2010	10:53:29 PM	SiCl4 pre valve closed
10/1/2010	10:53:29 PM	SiCl4 post valve closed
10/1/2010	10:53:29 PM	Bubbler valve closed
10/1/2010	10:53:29 PM	Helium valve opened
10/1/2010	10:53:29 PM	Main Vac valve opened
10/1/2010	10:53:29 PM	Bypass valve opened
10/1/2010	10:53:29 PM	Helium MFC set to  100.000000
10/1/2010	10:53:29 PM	H2 MFC set to  0.000000
10/1/2010	10:53:29 PM	BCl3 MFC set to  0.000000
10/1/2010	10:53:29 PM	PHl3 MFC set to  0.000000
10/1/2010	10:53:29 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:53:29 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:53:29 PM	Tube furnace set to 0
10/1/2010	10:53:31 PM	Helium valve closed
10/1/2010	10:53:31 PM	H2 valve closed
10/1/2010	10:53:31 PM	BCl3 valve closed
10/1/2010	10:53:31 PM	PH3 valve closed
10/1/2010	10:53:31 PM	SiCl4 pre valve closed
10/1/2010	10:53:31 PM	SiCl4 post valve closed
10/1/2010	10:53:31 PM	Bubbler valve closed
10/1/2010	10:53:31 PM	Main Vac valve opened
10/1/2010	10:53:31 PM	Bypass valve opened
10/1/2010	10:53:31 PM	Helium MFC set to  0.000000
10/1/2010	10:53:31 PM	H2 MFC set to  0.000000
10/1/2010	10:53:31 PM	BCl3 MFC set to  0.000000
10/1/2010	10:53:31 PM	PHl3 MFC set to  0.000000
10/1/2010	10:53:31 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:53:31 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:53:31 PM	Tube furnace set to 0
10/1/2010	10:53:33 PM	Run aborted at 10:53 PM
10/1/2010	10:53:33 PM	Helium valve closed
10/1/2010	10:53:33 PM	H2 valve closed
10/1/2010	10:53:33 PM	BCl3 valve closed
10/1/2010	10:53:33 PM	PH3 valve closed
10/1/2010	10:53:33 PM	SiCl4 pre valve closed
10/1/2010	10:53:33 PM	SiCl4 post valve closed
10/1/2010	10:53:33 PM	Bypass valve closed
10/1/2010	10:53:33 PM	Main Vac valve closed
10/1/2010	10:53:33 PM	Bubbler valve closed
10/1/2010	10:53:33 PM	Helium MFC set to  0.000000
10/1/2010	10:53:33 PM	H2 MFC set to  0.000000
10/1/2010	10:53:33 PM	BCl3 MFC set to  0.000000
10/1/2010	10:53:33 PM	PHl3 MFC set to  0.000000
10/1/2010	10:53:33 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:53:33 PM	Tube furnace set to 0
10/1/2010	10:53:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	10:53:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	10:53:36 PM	Recipe started at 10:53 PM
10/1/2010	10:53:36 PM	Helium valve closed
10/1/2010	10:53:36 PM	H2 valve closed
10/1/2010	10:53:36 PM	BCl3 valve closed
10/1/2010	10:53:36 PM	PH3 valve closed
10/1/2010	10:53:36 PM	SiCl4 pre valve closed
10/1/2010	10:53:36 PM	SiCl4 post valve closed
10/1/2010	10:53:36 PM	Main Vac valve closed
10/1/2010	10:53:36 PM	Bubbler valve closed
10/1/2010	10:53:36 PM	Bypass valve opened
10/1/2010	10:53:36 PM	Helium MFC set to  0.000000
10/1/2010	10:53:36 PM	H2 MFC set to  0.000000
10/1/2010	10:53:36 PM	BCl3 MFC set to  0.000000
10/1/2010	10:53:36 PM	PHl3 MFC set to  0.000000
10/1/2010	10:53:36 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:53:36 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:53:36 PM	Tube furnace set to 0
10/1/2010	10:53:36 PM	Helium valve closed
10/1/2010	10:53:36 PM	H2 valve closed
10/1/2010	10:53:36 PM	BCl3 valve closed
10/1/2010	10:53:36 PM	PH3 valve closed
10/1/2010	10:53:36 PM	SiCl4 pre valve closed
10/1/2010	10:53:36 PM	SiCl4 post valve closed
10/1/2010	10:53:36 PM	Bubbler valve closed
10/1/2010	10:53:36 PM	Main Vac valve opened
10/1/2010	10:53:36 PM	Bypass valve opened
10/1/2010	10:53:36 PM	Helium MFC set to  0.000000
10/1/2010	10:53:36 PM	H2 MFC set to  0.000000
10/1/2010	10:53:36 PM	BCl3 MFC set to  0.000000
10/1/2010	10:53:36 PM	PHl3 MFC set to  0.000000
10/1/2010	10:53:36 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:53:36 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:53:36 PM	Tube furnace set to 0
10/1/2010	10:53:37 PM	Run finished at 10:53 PM
10/1/2010	10:53:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	10:53:40 PM	Helium MFC set to  100.000000
10/1/2010	10:53:41 PM	Helium valve opened
10/1/2010	10:54:12 PM	Helium valve closed
10/1/2010	10:54:14 PM	Helium MFC set to  0.000000
10/1/2010	10:54:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	10:54:16 PM	Recipe started at 10:54 PM
10/1/2010	10:54:16 PM	Helium valve closed
10/1/2010	10:54:16 PM	H2 valve closed
10/1/2010	10:54:16 PM	BCl3 valve closed
10/1/2010	10:54:16 PM	PH3 valve closed
10/1/2010	10:54:16 PM	SiCl4 pre valve closed
10/1/2010	10:54:16 PM	SiCl4 post valve closed
10/1/2010	10:54:16 PM	Main Vac valve closed
10/1/2010	10:54:16 PM	Bubbler valve closed
10/1/2010	10:54:16 PM	Bypass valve opened
10/1/2010	10:54:16 PM	Helium MFC set to  0.000000
10/1/2010	10:54:16 PM	H2 MFC set to  0.000000
10/1/2010	10:54:16 PM	BCl3 MFC set to  0.000000
10/1/2010	10:54:16 PM	PHl3 MFC set to  0.000000
10/1/2010	10:54:16 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:54:16 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:54:16 PM	Tube furnace set to 0
10/1/2010	10:54:17 PM	Helium valve closed
10/1/2010	10:54:17 PM	H2 valve closed
10/1/2010	10:54:17 PM	BCl3 valve closed
10/1/2010	10:54:17 PM	PH3 valve closed
10/1/2010	10:54:17 PM	SiCl4 pre valve closed
10/1/2010	10:54:17 PM	SiCl4 post valve closed
10/1/2010	10:54:17 PM	Bubbler valve closed
10/1/2010	10:54:17 PM	Main Vac valve opened
10/1/2010	10:54:17 PM	Bypass valve opened
10/1/2010	10:54:17 PM	Helium MFC set to  0.000000
10/1/2010	10:54:17 PM	H2 MFC set to  0.000000
10/1/2010	10:54:17 PM	BCl3 MFC set to  0.000000
10/1/2010	10:54:17 PM	PHl3 MFC set to  0.000000
10/1/2010	10:54:17 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:54:17 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:54:17 PM	Tube furnace set to 0
10/1/2010	10:54:17 PM	Run finished at 10:54 PM
10/1/2010	10:54:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	10:55:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	10:55:15 PM	Recipe started at 10:55 PM
10/1/2010	10:55:15 PM	Helium valve closed
10/1/2010	10:55:15 PM	H2 valve closed
10/1/2010	10:55:15 PM	BCl3 valve closed
10/1/2010	10:55:15 PM	PH3 valve closed
10/1/2010	10:55:15 PM	SiCl4 pre valve closed
10/1/2010	10:55:15 PM	SiCl4 post valve closed
10/1/2010	10:55:15 PM	Main Vac valve closed
10/1/2010	10:55:15 PM	Bubbler valve closed
10/1/2010	10:55:15 PM	Bypass valve opened
10/1/2010	10:55:15 PM	Helium MFC set to  0.000000
10/1/2010	10:55:15 PM	H2 MFC set to  0.000000
10/1/2010	10:55:15 PM	BCl3 MFC set to  0.000000
10/1/2010	10:55:15 PM	PHl3 MFC set to  0.000000
10/1/2010	10:55:15 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:55:15 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:55:15 PM	Tube furnace set to 0
10/1/2010	10:55:15 PM	Helium valve closed
10/1/2010	10:55:15 PM	H2 valve closed
10/1/2010	10:55:15 PM	BCl3 valve closed
10/1/2010	10:55:15 PM	PH3 valve closed
10/1/2010	10:55:15 PM	SiCl4 pre valve closed
10/1/2010	10:55:15 PM	SiCl4 post valve closed
10/1/2010	10:55:15 PM	Bubbler valve closed
10/1/2010	10:55:15 PM	Main Vac valve opened
10/1/2010	10:55:15 PM	Bypass valve opened
10/1/2010	10:55:15 PM	Helium MFC set to  0.000000
10/1/2010	10:55:15 PM	H2 MFC set to  0.000000
10/1/2010	10:55:15 PM	BCl3 MFC set to  0.000000
10/1/2010	10:55:15 PM	PHl3 MFC set to  0.000000
10/1/2010	10:55:15 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:55:15 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:55:16 PM	Tube furnace set to 0
10/1/2010	10:55:18 PM	Run aborted at 10:55 PM
10/1/2010	10:55:18 PM	Helium valve closed
10/1/2010	10:55:18 PM	H2 valve closed
10/1/2010	10:55:18 PM	BCl3 valve closed
10/1/2010	10:55:18 PM	PH3 valve closed
10/1/2010	10:55:18 PM	SiCl4 pre valve closed
10/1/2010	10:55:18 PM	SiCl4 post valve closed
10/1/2010	10:55:18 PM	Bypass valve closed
10/1/2010	10:55:18 PM	Main Vac valve closed
10/1/2010	10:55:18 PM	Bubbler valve closed
10/1/2010	10:55:18 PM	Helium MFC set to  0.000000
10/1/2010	10:55:18 PM	H2 MFC set to  0.000000
10/1/2010	10:55:18 PM	BCl3 MFC set to  0.000000
10/1/2010	10:55:18 PM	PHl3 MFC set to  0.000000
10/1/2010	10:55:18 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:55:18 PM	Tube furnace set to 0
10/1/2010	10:55:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/1/2010	10:55:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	10:55:21 PM	Recipe started at 10:55 PM
10/1/2010	10:55:21 PM	Helium valve closed
10/1/2010	10:55:21 PM	H2 valve closed
10/1/2010	10:55:21 PM	BCl3 valve closed
10/1/2010	10:55:21 PM	PH3 valve closed
10/1/2010	10:55:21 PM	SiCl4 pre valve closed
10/1/2010	10:55:21 PM	SiCl4 post valve closed
10/1/2010	10:55:21 PM	Main Vac valve closed
10/1/2010	10:55:21 PM	Bubbler valve closed
10/1/2010	10:55:21 PM	Bypass valve opened
10/1/2010	10:55:21 PM	Helium MFC set to  0.000000
10/1/2010	10:55:21 PM	H2 MFC set to  0.000000
10/1/2010	10:55:21 PM	BCl3 MFC set to  0.000000
10/1/2010	10:55:21 PM	PHl3 MFC set to  0.000000
10/1/2010	10:55:21 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:55:21 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:55:21 PM	Tube furnace set to 0
10/1/2010	10:55:22 PM	Helium valve closed
10/1/2010	10:55:22 PM	H2 valve closed
10/1/2010	10:55:22 PM	BCl3 valve closed
10/1/2010	10:55:22 PM	PH3 valve closed
10/1/2010	10:55:22 PM	SiCl4 pre valve closed
10/1/2010	10:55:22 PM	SiCl4 post valve closed
10/1/2010	10:55:22 PM	Bubbler valve closed
10/1/2010	10:55:22 PM	Main Vac valve opened
10/1/2010	10:55:22 PM	Bypass valve opened
10/1/2010	10:55:22 PM	Helium MFC set to  0.000000
10/1/2010	10:55:22 PM	H2 MFC set to  0.000000
10/1/2010	10:55:22 PM	BCl3 MFC set to  0.000000
10/1/2010	10:55:22 PM	PHl3 MFC set to  0.000000
10/1/2010	10:55:22 PM	SiCl4 MFC set to  0.000000
10/1/2010	10:55:22 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	10:55:22 PM	Tube furnace set to 0
10/1/2010	10:55:22 PM	Run finished at 10:55 PM
10/1/2010	10:55:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	10:55:25 PM	Helium MFC set to  100.000000
10/1/2010	10:55:26 PM	Helium valve opened
10/1/2010	11:04:24 PM	Helium valve closed
10/1/2010	11:04:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	11:04:26 PM	Recipe started at 11:04 PM
10/1/2010	11:04:26 PM	Helium valve closed
10/1/2010	11:04:26 PM	H2 valve closed
10/1/2010	11:04:26 PM	BCl3 valve closed
10/1/2010	11:04:26 PM	PH3 valve closed
10/1/2010	11:04:26 PM	SiCl4 pre valve closed
10/1/2010	11:04:26 PM	SiCl4 post valve closed
10/1/2010	11:04:26 PM	Main Vac valve closed
10/1/2010	11:04:26 PM	Bubbler valve closed
10/1/2010	11:04:26 PM	Bypass valve opened
10/1/2010	11:04:26 PM	Helium MFC set to  0.000000
10/1/2010	11:04:26 PM	H2 MFC set to  0.000000
10/1/2010	11:04:26 PM	BCl3 MFC set to  0.000000
10/1/2010	11:04:26 PM	PHl3 MFC set to  0.000000
10/1/2010	11:04:26 PM	SiCl4 MFC set to  0.000000
10/1/2010	11:04:26 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	11:04:26 PM	Tube furnace set to 0
10/1/2010	11:04:26 PM	Helium valve closed
10/1/2010	11:04:26 PM	H2 valve closed
10/1/2010	11:04:26 PM	BCl3 valve closed
10/1/2010	11:04:26 PM	PH3 valve closed
10/1/2010	11:04:26 PM	SiCl4 pre valve closed
10/1/2010	11:04:26 PM	SiCl4 post valve closed
10/1/2010	11:04:26 PM	Bubbler valve closed
10/1/2010	11:04:26 PM	Main Vac valve opened
10/1/2010	11:04:26 PM	Bypass valve opened
10/1/2010	11:04:26 PM	Helium MFC set to  0.000000
10/1/2010	11:04:26 PM	H2 MFC set to  0.000000
10/1/2010	11:04:26 PM	BCl3 MFC set to  0.000000
10/1/2010	11:04:26 PM	PHl3 MFC set to  0.000000
10/1/2010	11:04:26 PM	SiCl4 MFC set to  0.000000
10/1/2010	11:04:26 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	11:04:26 PM	Tube furnace set to 0
10/1/2010	11:04:26 PM	Run finished at 11:04 PM
10/1/2010	11:04:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2010	11:05:11 PM	Recipe started at 11:05 PM
10/1/2010	11:05:11 PM	Helium valve closed
10/1/2010	11:05:11 PM	BCl3 valve closed
10/1/2010	11:05:11 PM	PH3 valve closed
10/1/2010	11:05:11 PM	SiCl4 pre valve closed
10/1/2010	11:05:11 PM	SiCl4 post valve closed
10/1/2010	11:05:11 PM	Main Vac valve closed
10/1/2010	11:05:11 PM	Bypass valve closed
10/1/2010	11:05:11 PM	Bubbler valve closed
10/1/2010	11:05:11 PM	H2 valve opened
10/1/2010	11:05:11 PM	Helium MFC set to  0.000000
10/1/2010	11:05:11 PM	H2 MFC set to  500.000000
10/1/2010	11:05:11 PM	BCl3 MFC set to  0.000000
10/1/2010	11:05:11 PM	PHl3 MFC set to  0.000000
10/1/2010	11:05:11 PM	SiCl4 MFC set to  0.000000
10/1/2010	11:05:11 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	11:05:11 PM	Tube furnace set to 1000
10/1/2010	11:06:29 PM	Helium valve closed
10/1/2010	11:06:29 PM	BCl3 valve closed
10/1/2010	11:06:29 PM	PH3 valve closed
10/1/2010	11:06:29 PM	SiCl4 pre valve closed
10/1/2010	11:06:29 PM	SiCl4 post valve closed
10/1/2010	11:06:29 PM	Main Vac valve closed
10/1/2010	11:06:29 PM	Bypass valve closed
10/1/2010	11:06:29 PM	H2 valve opened
10/1/2010	11:06:29 PM	Bubbler valve opened
10/1/2010	11:06:29 PM	Helium MFC set to  0.000000
10/1/2010	11:06:29 PM	H2 MFC set to  500.000000
10/1/2010	11:06:29 PM	BCl3 MFC set to  0.000000
10/1/2010	11:06:29 PM	PHl3 MFC set to  0.000000
10/1/2010	11:06:29 PM	SiCl4 MFC set to  0.000000
10/1/2010	11:06:29 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	11:06:29 PM	Tube furnace set to 1000
10/1/2010	11:26:29 PM	Helium valve closed
10/1/2010	11:26:29 PM	PH3 valve closed
10/1/2010	11:26:29 PM	Main Vac valve closed
10/1/2010	11:26:29 PM	Bypass valve closed
10/1/2010	11:26:29 PM	H2 valve opened
10/1/2010	11:26:29 PM	BCl3 valve opened
10/1/2010	11:26:29 PM	SiCl4 pre valve opened
10/1/2010	11:26:29 PM	SiCl4 post valve opened
10/1/2010	11:26:29 PM	Bubbler valve opened
10/1/2010	11:26:29 PM	Helium MFC set to  0.000000
10/1/2010	11:26:29 PM	H2 MFC set to  500.000000
10/1/2010	11:26:29 PM	BCl3 MFC set to  12.000000
10/1/2010	11:26:29 PM	PHl3 MFC set to  0.000000
10/1/2010	11:26:29 PM	SiCl4 MFC set to  50.000000
10/1/2010	11:26:29 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	11:26:30 PM	Tube furnace set to 1000
10/1/2010	11:39:50 PM	Helium valve closed
10/1/2010	11:39:50 PM	BCl3 valve closed
10/1/2010	11:39:50 PM	PH3 valve closed
10/1/2010	11:39:50 PM	SiCl4 pre valve closed
10/1/2010	11:39:50 PM	SiCl4 post valve closed
10/1/2010	11:39:50 PM	Main Vac valve closed
10/1/2010	11:39:50 PM	Bypass valve closed
10/1/2010	11:39:50 PM	H2 valve opened
10/1/2010	11:39:50 PM	Bubbler valve opened
10/1/2010	11:39:50 PM	Helium MFC set to  0.000000
10/1/2010	11:39:50 PM	H2 MFC set to  500.000000
10/1/2010	11:39:50 PM	BCl3 MFC set to  0.000000
10/1/2010	11:39:50 PM	PHl3 MFC set to  0.000000
10/1/2010	11:39:50 PM	SiCl4 MFC set to  0.000000
10/1/2010	11:39:50 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	11:39:50 PM	Tube furnace set to 750
10/1/2010	11:59:50 PM	H2 valve closed
10/1/2010	11:59:50 PM	BCl3 valve closed
10/1/2010	11:59:50 PM	PH3 valve closed
10/1/2010	11:59:50 PM	SiCl4 pre valve closed
10/1/2010	11:59:50 PM	SiCl4 post valve closed
10/1/2010	11:59:50 PM	Main Vac valve closed
10/1/2010	11:59:50 PM	Bypass valve closed
10/1/2010	11:59:50 PM	Helium valve opened
10/1/2010	11:59:50 PM	Bubbler valve opened
10/1/2010	11:59:50 PM	Helium MFC set to  500.000000
10/1/2010	11:59:50 PM	H2 MFC set to  0.000000
10/1/2010	11:59:50 PM	BCl3 MFC set to  0.000000
10/1/2010	11:59:50 PM	PHl3 MFC set to  0.000000
10/1/2010	11:59:50 PM	SiCl4 MFC set to  0.000000
10/1/2010	11:59:50 PM	Bypass solenoid MFC set to  0.000000
10/1/2010	11:59:50 PM	Tube furnace set to 0
